Industrial Technology Research Institute

Accent Optical Technologies, Inc.

An-Shun Liu

Hui-Lung Kuo

Ping-Chen Chen

Nigel Peter Smith

Chun-Hsiang Wen

Liang-Bin Yu

Yaw-Ting Wu

Kuo-Tung Huang

Yi Sha Ku

Ming-Lang Tsai

Ying-Chiang Hu

Chih-Kng Lee

A method of measuring dimensions for an optical system to measure the critical dimension of a sample object according to this aspect of the present invention includes the steps of preparing a plurality of standard objects, selecting a predetermined focus metric algorithm, performing an analyzing process on each standard object to generate a plurality of focus metric distributions using the predetermined focus metric algorithm, analyzing the focus metric distributions to determine a target order, generating a reference relation, acquiring a measured characteristic value from the sample object, and determining the critical dimension of the sample object based on the measured characteristic value and the reference relation. Each standard object has a grating-shaped standard pattern with a predetermined pitch and line width. The focus metric algorithm is a gradient energy method, a Laplacian method, a standard deviation method, or a contrast method.

Method for measuring dimensions and optical system using the same

The light-guide module for emitting particular polarized light beams includes a splitter for separating non-polarized light beams, a transformer for converting polarization of light beams, and a non-polarized light source. The non-polarized light source emits light beams. Particular polarized light beams pass the splitter and other light beams are reflected by the splitter. Polarizations of reflected light beams and of light beams emitted by the non-polarized light source are converted by the transformer so as to separate the light beams later. Thus the light-guide module for emitting particular polarized light beams loses relatively little light energy.

Light-guide module for emitting particular polarized light beams

Growing community of inventors

Hsinchu, Taiwan

An-Shun Liu