Average Co-Inventor Count = 1.50
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Tencor Corporation (1 from 1,787 patents)
2. Nanjing Lian Semiconductor Limited (1 from 1 patent)
3. Nanjing Zongan Semiconductor Equipment Ltd (0 patent)
2 patents:
1. 11105753 - Wafer shape and flatness measurement apparatus and method
2. 8621945 - Method and apparatus for improving the temperature stability and minimizing the noise of the environment that encloses an interferometric measuring system