Nalco Chemical Company

Nalco Company

Ecolab USA Inc.

Amy M Tseng

Brian V Jenkins

Robert M Mack

John H Collins

Dodd W Fong

John E Hoots

Anthony G Sommese

Patrick G Murray

Jawed M Sarkar

Don Sproul

A method of detecting and measuring the presence of ammonium fluoride in a buffered oxide etchant ('BOE') composition is provided. The method comprises contacting a BOE composition with a chromogenic agent selected from bromothymol blue, Eosin-Bluish, indophenol blue, bromocresol green, orthophthaldialdehyde, tetraphenylprophyrin, acridine orange, naphthalene-2,3-dicarboxaldehyde, 2-mercaptoethanol, n-acetylcysteine, luminal, bromocresol purple, or bromophenol blue and at least one of sodium hydroxide, ammonium nitrate, ammonium chloride, tartaric acid, octylphenoxypolyethoxyethanol, Triton X-100, borate buffer, sodium chloride, sodium tetra borate decahydrate, sodium sulfite, and Brij35 to form a treated BOE composition, the treated BOE composition having spectroscopic properties resulting from the contacting that correlate with the amount of ammonium fluoride in the treated BOE composition, performing a spectrometric measurement of the spectroscopic properties of the treated BOE composition, and comparing the spectrometric measurement to pre-determined values to identify the amount of ammonium fluoride in the BOE composition.

Control over etching molecule levels in etching compositions

The invention is directed towards methods and compositions for identifying the amount of hydrofluoric acid in a buffered oxide etching composition. In buffered oxide etching compositions it is very difficult to measure the amount of hydrofluoric acid because it has varying equilibriums and it is toxic so it hard to handle and sample. When used to manufacture microchips however, incorrect amounts of hydrofluoric acid will ruin those chips. The invention utilizes a unique method of spectrographically measuring the hydrofluoric acid when in contact with added chromogenic agents to obtain exact measurements that are accurate, immediate, and safe.

Control over hydrogen fluoride levels in oxide etchant

The invention is directed towards methods and compositions for identifying the amount of ammonium acid in a buffered oxide etching composition. In buffered oxide etching compositions it is very difficult to measure the amount of ammonium acid because it has varying equilibriums and it is toxic so it hard to handle and sample. When used to manufacture microchips however, incorrect amounts of ammonium acid will ruin those chips. The invention utilizes a unique method of spectrographically measuring the ammonium acid when in contact with added chromogenic agents to obtain exact measurements that are accurate, immediate, and safe.

Control over ammonium fluoride levels in oxide etchant

A method of monitoring a surfactant in a microelectronic process is disclosed. Specifically, the monitoring of a surfactant occurs by studying the fluorescence or electromagnetic emission of a sample collected from a microelectronic process.

Method of monitoring a surfactant in a microelectronic process by fluorescence

A method of monitoring a surfactant in a microelectronic process is disclosed. Specifically, the monitoring of a surfactant occurs by studying the absorbance of a sample collected from a microelectronic process.

Method of monitoring a surfactant in a microelectronic process by absorbance

Luminol derived monomers, and luminol derived water-treatment polymers formed from the luminol derived monomers, as well as methods for monitoring of the chemiluminescence of such water-treatment polymers are disclosed. The novel chemiluminescent polymers require only a very low level of incorporation of the chemiluminescent moiety, and are useful for monitoring, even in systems containing impurities which either quench fluorescence or fluoresce themselves.

Cationic chemiluminescent monomers and polymers

The invention comprises a process for removing true and apparent color from pulp and paper waste waters. It comprises treating these waste waters with a vinylamine polymer including from about 1 to about 100 mole percent vinylamine and from about 1 to about 99 mole percent of at least one monomer selected from the group consisting of amidine vinylformamide, vinyl alcohol, vinyl acetate, vinyl pyrrolidinone and the esters, amides, nitriles and salts of acrylic acid and methacrylic acid.

Vinylamine polymers for removing color from paper mill effluents

The invention comprises a process for removing true and apparent color from pulp and paper waste waters. It comprises treating these waste waters with a coagulant and vinylamine polymer. The coagulant is selected from the group consisting of epichlorohydrin-dimethylamine, guanidine-formaldehyde condensation polymers, cyanoguanidine-formaldehyde condensation polymers, urea-formaldehyde condensation polymers, polyethyleneimines, polydiallyldimethylammonium chloride, copolymers of polydiallyldimethylammonium chloride and acrylamide, and ethylenedichloride-ammonia. The vinylamine polymer includes from about 1 to about 100 mole percent vinylamine and from about 1 to about 99 mole percent of at least one monomer selected from the group consisting of amidine vinylformamide, vinyl alcohol, vinyl acetate, vinyl pyrrolidinone and the esters, amides, nitriles and salts of acrylic acid and methacrylic acid.

Vinylamine polymers and coagulants for removing color from paper mill

A process for removing color from a pulp and paper wastewater which comprises the following steps: (a) treating the wastewater with a reducing agent which is capable of inactivating color producing functional groups of the wastewater; and (b) treating the wastewater subsequent to step (a) with a polymer which is capable of removing color from the wastewater.

Growing community of inventors

Woodridge, IL, United States of America

Amy M Tseng