California Institute of Technology

Other

University of California

City of Hope

Tanner Research, Inc.

City of Hope National Medical Center and Beckman Research Institute

Amish Desai

Yu-Chong Tai

Terry D Lee

Xuan-Qi Wang

Lawrence Licklider

Xing Yang

Brian Edward Fuchs

Chih-Ming Ho

Stephen L Mayo

Ming Judy Lu

Denny K Miu

Ravi Verma

Chang Liu

Massimo Antonio Sivilotti

Tom Tsao

Stephen Chau

Sang Wook Lee

Raanan Miller

Jeremy Tzong-Shyng Leu

Mike Davis

Dirk Bockenkamp

Elaine Marzluff

Bob Melendes

A microcavity structure. In an illustrative embodiment, the microcavity structure includes a first substrate, which has a region of interest. A second substrate with a perforation therein is bonded to the first substrate. The perforation coincides with the region of interest. In a specific embodiment, the first substrate is implemented via a Printed Circuit Board (PCB). The region of interest includes one or more circuit components, including an actuator, such as a bridgewire, thereon or therein. A smoothing layer is included between the PCB and the actuator. A bonding gasket adheres the first substrate to the second substrate. The perforation accommodates energetic material that is selectively ignited via the actuator.

Multilayered microcavities and actuators incorporating same

An actuator assembly that includes, in one example embodiment, a substrate with a bridge coupled between a first electrode and a second electrode on the substrate. A lithographically disposed flyer is positioned in proximity to the bridge. In a more specific embodiment, the actuator assembly further includes a lithographically disposed barrel that partially surrounds the flyer. A fireset is coupled to pins that extend through the substrate to the first electrode and the second electrode. The flyer further includes a three-dimensional surface adapted to flatten during flight. The flyer may be concave, convex, or may star shaped, may have perforations therein, or may exhibit another shape or other features.

Efficient exploding foil initiator and process for making same

A MEMS device with an overhanging 'polymer' capillary provides vital and significant improvements in interfacing a MEMS electrospray nozzle to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters and centimeter long serpentine micro channels provided on-chip and fabricated using a low temperature process.

Polymer based electrospray nozzle for mass spectrometry

A versatile cavity actuator. The versatile cavity actuator includes a cavity having one or more polymer-based sidewalls. An energetic material is disposed therein. A heater is disposed on or within the cavity. In a specific embodiment, the cavity includes a thermally insulating base positioned beneath the heater, which is positioned near the bottom of the cavity. The polymer-based sidewalls are constructed from a photo-curable epoxy, which is disposed on a substrate via microelectromechanical processes. The sidewalls are angled or parabolic and are constructed via a low-temperature lithographic spin process compatible with post integrated circuit processing.

Versatile cavity actuator and systems incorporating same

Methods and apparatus implementing a technique for electrostatically transporting a particle through a medium. In general, one implementation includes a substrate; a first insulation layer formed on the substrate; a plurality of electrodes arranged in a sequence on the insulation layer, where the electrodes are divided into a plurality of groups and the electrodes are arranged by group; a second insulation layer over at least one of the electrodes; and a phase shift circuit connected to the electrodes which supplies a voltage wave-form to each group of electrodes, where each voltage wave-form for each group is phase-shifted relative to the other phase-shifted wave-forms.

Electrostatic particle transportation

An apparatus for MEMS electrospray nozzle for mass spectroscopy formed with top and bottom of SiN, and a between layer of material. The material between the top and bottom forms a filter and also reduces the amount of dead space in the nozzle.

MEMS electrospray nozzle for mass spectroscopy

A micromachined, high Reynolds number, sub-millisecond liquid mixer for the study of chemical reaction kinetics. This bulk micromachined silicon mixer is capable of initiating and quenching chemical reactions in intervals as short as 100 .mu.s. The mixer chip contains two tee mixers connected by one channel which serves as a reaction chamber. Each tee mixer consists of opposing channels where liquids meet head-on and exit into a third channel forming the base of a 'T'.

Microfluidic sub-millisecond mixers

A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate. The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

Electromagnetically actuated micromachined flap

Growing community of inventors

Altadena, CA, United States of America

Amish Desai