Other

Honeywell G.m.b.h.

Amir R Mirza

James Kevin Carney

Robert D Horning

David W Burns

Thomas George Stratton

G Benjamin Hocker

Deidrich J Saathoff

Scott A McPherson

Akintunde I Akinwande

This patent relates to the fabrication of diaphragm-based microstructures used primarily for sensing physical phenomena by detecting a change in deflection, resonance, or curvature of the diaphragm. The methods of fabrication described and claimed herein relate primarily to diaphragm-based diaphragms made of silicon, either single crystal or polycrystalline in form, although other materials may be used.

Method for making diaphragm-based sensors and apparatus constructed

The formation of diaphragms by silicon wafer bonding provides for a structure having at least two such diaphragms with cavities in the wafers to which the diaphragm layer is bonded. Passageways through the wafers provide for communication of a fluid to the diaphragms. In some locations less than all of a plurality of diaphragms may be bonded to only one wafter having a cavity adjacent the diaphragm.

Diaphragm-based-sensors

Growing community of inventors

Golden Valley, MN, United States of America

Amir R Mirza