Applied Materials, Inc.

Heliotrope Technologies, Inc.

Heliotrope Europe S.l.

First Solar, Inc.

Hivisq Technologies, S.l.

Hivisq Technologies Sociedad Limitada

Amir Bayati

Guillermo Garcia

Philip Allan Kraus

Jason K Holt

Xiaoliang Wang

Kelvin Chan

Adrian Winoto

Kenric T Choi

William John Durand

Bonil Koo

Douglas Weir

Evelyn Davies

Hai Wang

Kallol Bera

Yaoling Pan

Chuang-Chia Lin

David John Peterson

Xiaopu Li

Abdullah Zafar

Pedro Gonzalez

John Bohland

Janina Motter

Dipankar Pramanik

Scott V Thomsen

Willem Den Boer

Zhi-Wen Sun

David J Coumou

Adolph Miller Allen

Yashraj K Bhatnagar

Martin A Hilkene

Sergey V Barabash

Farzad Houshmand

Michelle SanPedro

Xinyuan Chong

Weize Hu

Sven Schramm

David England

Usman Chowdhury

Elias Martinez

Kasturi Sarang

George Rubin

John Santos

Le Sheng Nicholas Yiu

Peter Green

Vapor concentration sensors for deposition process or deposition chamber condition monitoring are described. In an example, a deposition system includes a deposition chamber, a deposition precursor source coupled to an inlet of the deposition chamber, and a non-dispersive infrared (NDIR) vapor concentration sensor between the deposition precursor source and the deposition chamber.

Vapor concentration sensors for process chambers

Embodiments disclosed herein include a moisture detection module. In an embodiment, the moisture detection module comprises an optical bandpass filter configured to be optically coupled to a light source, where a passband is centered at 309 nm. In an embodiment, the moisture detection module further comprises a detector optically coupled to the optical bandpass filter.

Chamber moisture control using narrow optical filters measuring emission lines

Methods and apparatus for processing a substrate are provided herein. For example, a gas supply configured for use with a processing chamber includes an ampoule that stores a precursor and comprises an input to receive a carrier gas and an output to provide a mixture of the carrier gas and the precursor to the processing chamber and a sensor assembly comprising a detector and an infrared source operably connected to an outside of an enclosure, through which the mixture flows, and a gas measurement volume disposed within the enclosure and along an inner wall thereof so that a concentration of the precursor in the mixture can be measured by the detector and transmitted to a controller.

Methods and apparatus for processing a substrate

Embodiments disclosed herein include gas concentration sensors, and methods of using such gas concentration sensors. In an embodiment, a gas concentration sensor comprises a first electrode. In an embodiment the first electrode comprises first fingers. In an embodiment, the gas concentration sensor further comprises a second electrode. In an embodiment, the second electrode comprises second fingers that are interdigitated with the first fingers.

Capacitive sensor for monitoring gas concentration

Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure. In an embodiment, the first structure is different than the second structure.

MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing

An electrochromic device includes a light transmissive first substrate, a working electrode disposed on the first substrate, a light transmissive second substrate facing the first substrate, a counter electrode disposed on the second substrate, and a lithium-rich anti-perovskite (LiRAP) material disposed between the first and second substrates. The LiRAP material includes an ionically conductive and electrically insulating LiRAP material.

Electrochromic device including lithium-rich anti-perovskite material

A method of forming an electrochromic (EC) device includes forming a solid-state first electrolyte layer, after forming the solid-state first electrolyte layer, laminating the first solid-state first electrolyte layer between a transparent first substrate and a transparent second substrate such that a transparent first electrode is disposed between the first substrate and a first side of the solid-state first electrolyte layer, and a transparent second electrode is disposed between the second substrate and a second side of the solid-state first electrolyte layer, and applying a sealant to seal the solid-state first electrolyte layer between the first and second substrates and to form the EC device.

Methods of manufacturing electrochromic devices containing a solid-state electrolyte

An electrochromic (EC) device includes a first substrate, a second substrate, a transparent first conductor disposed between the first and second substrates, a transparent second conductor disposed between the first and second substrates, a working electrode disposed between the first and second conductors, a counter electrode disposed between the working electrode and the second conductor, and an electrolyte disposed between the working and counter electrodes. At least one of the first or second conductors is a multipart conductor which includes a transparent first conductive film, a first contact strip extending lengthwise in a first direction which is perpendicular to a second direction, along a first side of the EC device, and first conductive lines extending from the first contact strip toward an opposing second side of the EC device. The multipart conductor has a lower effective sheet resistance in the second direction than in the first direction.

Electrochromic device including transparent conductors having reduced sheet resistance in a direction of current flow

A gel electrolyte precursor composition, an electrochromic device including a gel electrolyte formed from the precursor composition, and methods of forming the electrochromic device, the precursor composition including polymer network precursors including polyurethane acrylate oligomers, an ionically conducting phase, and an initiator.

Gel electrolyte precursor compositions, electrochromic devices including gel electrolytes, and manufacturing methods thereof

An electrochromic (EC) device and method of operating the same, the EC device including a transparent substrate, a working electrode disposed on the substrate and including electrochromic inorganic nanoparticles, a counter electrode, and an electrolyte disposed between the working electrode and the counter electrode, the electrolyte including an electrochromic organic material.

Hybrid electrochromic devices and methods

Various embodiments may include methods of controlling a temperature of an electrochromic device. The methods may include determining a current temperature of the electrochromic device which includes a first transparent conductor electrically connected to a working electrode, and a second transparent conductor electrically connected to a counter electrode, and applying the heating current to the first transparent conductor and the second transparent conductor if the current temperature is below a minimum temperature to heat the electrochromic device. Further embodiments may include an electrochromic system including an electrochromic device and a controller configured to control the temperature of the electrochromic device.

Temperature control for electrochromic devices

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Santa Clara, CA, United States of America

Amir Bayati