Commissariat a L'energie Atomique Et Aux Energies Alternatives

Idemia Identity & Security France

Amelie Revaux

Jean-François Mainguet

Mohammed Benwadih

Joel Yann Fourre

Method for manufacturing a device comprising a stack including a first layer comprising electrical conductors electrically insulated from each other, a second electrically conducting layer, a third layer of pyroelectric material, said third layer being arranged between the first layer and the second layer, said method comprising,

Method of manufacturing a device comprising a material acquiring an electrical property after have been subjected to an electric polarisation

A thermal pattern sensor including a plurality of pixels arranged on a substrate. Each pixel has a pyroelectric capacitance formed by at least one pyroelectric material portion arranged between a lower electrode and an upper electrode. The sensor has an abrasion-resistance coating, located on the side opposite the substrate and including pillars embedded in an abrasion-resistance layer, the pillars having a thermal conductivity strictly higher than that of the abrasion-resistance layer. A high thickness of the anti-abrasion protection coating can be achieved with a high rate of thermal transfer through the latter.

Pyroelectric sensor with improved abrasion-resistance coating

A method produces a matrix of pixels of a thermal sensor, suitable for passive addressing. The matrix of pixels includes a layer including a first series of electrically conducting strips, forming charge collection macro-electrodes; a layer including a pyroelectric material; and a layer including a second series of electrically conducting strips, forming heating strips. The method includes a step of transfer of one on the other of a first and a second elementary stack, the first elementary stack including the first series of strips, and the second elementary stack including the second series of strips. This method makes it possible to relax the manufacturing constraints of the series of strips.

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Grenoble, France

Amelie Revaux