International Business Machines Corporation

Amanda L Piper

Anthony K Stamper

Vincent James McGahay

Edward Crandal Cooney, Iii

William Thomas Motsiff

Robert Michael Geffken

Christy Sensenich Tyberg

David C Thomas

Mark P Murray

Elizabeth T Webster

Yun Yu Wang

Keith K Wong

Kevin E Mello

Michael M Iwatake

Matthew Wayne Oonk

A via contact is provided to a diffusion region at a top surface of a substrate which includes a single-crystal semiconductor region. The via contact includes a first layer which consists essentially of a silicide of a first metal in contact with the diffusion region at the top surface. A dielectric region overlies the first layer, the dielectric region having an outer surface and an opening extending from the outer surface to the top surface of the substrate. A second layer lines the opening and contacts the top surface of the substrate in the opening, the second layer including a second metal which lines a sidewall of the opening and a silicide of the second metal which is self-aligned to the top surface of the substrate in the opening. A diffusion barrier layer overlies the second layer within the opening. A third layer including a third metal overlies the diffusion barrier layer and fills the opening.

Via contact structure having dual silicide layers

A method of reworking BEOL (back end of a processing line) metallization levels of damascene metallurgy comprises forming a plurality of BEOL metallization levels over a substrate, forming line and via portions in the BEOL metallization levels, selectively removing at least one of the BEOL metallization levels to expose the line and via portions, and replacing the removed BEOL metallization levels with at least one new BEOL metallization level, wherein the BEOL metallization levels comprise a first dielectric layer and a second dielectric layer, and wherein the first dielectric layer comprising a lower dielectric constant material than the second dielectric layer.

Single and multilevel rework

Growing community of inventors

Wappingers Falls, NY, United States of America

Amanda L Piper