Corning Incorporated

Amanda Kathryn Thomas

Philip Robert LeBlanc

Rajeshkannan Palanisamy

Chong Pyung An

Uta-Barbara Goers

Correy Robert Ustanik

Michal Mlejnek

Johannes Moll

En Hong

Sung-chan Hwang

Ji Hwa Jung

Tae-ho Keem

Sung-jong Pyo

Hyeong-cheol Lee

A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.

Method and apparatus for inspecting defects on transparent substrate and method emitting incident light

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Corning, NY, United States of America

Amanda Kathryn Thomas