Vision Dynamics Holding B.v.

Alquin Alphons Elisabeth Stevens

Laurentia Johanna Huijbregts

Paulus Petrus Maria Blom

Edwin Te Sligte

Antonius Hubertus Van Schijndel

Hugo Anton Marie De Haan

Nicolaas Cornelis Josephus Van Hijningen

Tom Huiskamp

Philip Rosing

Eddy Bos

Device for generating a plasma discharge near a substrate for patterning the surface of the substrate, comprising a first electrode having a first discharge portion and a second electrode having a second discharge portion, a high voltage source for generating a high voltage difference between the first and the second electrode, and positioning means for positioning the first electrode with respect to the substrate. The device is further provided with an intermediate structure that is, in use, arranged in between the first electrode and the substrate while allowing for positioning the first electrode with respect to the substrate.

Device and method for generating a plasma discharge for patterning the surface of a substrate

Device for generating a plasma discharge for patterning the surface of a substrate, comprising a first electrode having a first discharge portion and a second electrode having a second discharge portion, a high voltage source for generating a high voltage difference between the first and the second electrode, and positioning means for positioning the first electrode with respect to the substrate, wherein the positioning means are arranged for selectively positioning the first electrode with respect to the second electrode in a first position in which a distance between the first discharge portion and the second discharge portion is sufficiently small to support the plasma discharge at the high voltage difference, and in a second position in which the distance between the first discharge portion and the second discharge portion is sufficiently large to prevent plasma discharge at the high voltage difference.

Device for generating a plasma discharge for patterning the surface of a substrate

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Eindhoven, Netherlands

Alquin Alphons Elisabeth Stevens