Imra America, Inc.

University of Michigan

Other

University of Central Florida Research Foundation, Inc.

Aisin Seiki Company, Ltd.

Optigrate Corporation

Ecole Polytechnique

Almantas Galvanauskas

Donald J Harter

Martin E Fermann

Gregg D Sucha

Ferenc Raksi

Ka K Wong

Mark Alan Arbore

Martin M Fejer

Leonid B Glebov

Vadim Smirnov

Anand Hariharan

Mark P Bendett

Kai-Chung Hou

Gérard Mourou

Michelle L Stock

Eugeniu Rotari

Boris Zeldovich

Julien Lumeau

Larissa Glebova

Sergiy Mokhov

Emilie Flecher

Kai-Hsiu Liao

Oleksiy Andrusyak

Danièle Hulin

A beam combining and pulse stacking technique is provided that enhances laser pulse energy by coherent stacking pulse bursts (i.e. non-periodic pulsed signals) in time domain. This energy enhancement is achieved by using various configurations of Fabry-Perot, Gires-Tournois and other types of resonant cavities, so that a multiple-pulse burst incident at either a single input or multiple inputs of the system produces an output with a solitary pulse, which contains the summed energy of the incident multiple pulses from all beams. This disclosure provides a substantial improvement over conventional coherent-combining methods in that it achieves very high pulse energies using a relatively small number of combined laser systems, thus providing with orders of magnitude reduction in system size, complexity, and cost compared to current combining approaches.

Coherent combining pulse bursts in time domain

A method for increasing energy in a pulse optical beam is provided. The method may include: receiving an optical input beam having a period pulse train with a given repetition frequency; splitting the input beam into N optical signals; phase modulating each signal in the N optical signals at a different phase, such that the N optical signal are orthogonal to each other; and coherently combining each of the phase modulated signals into a single optical output beam.

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Use of quasi-phase-matched (QPM) materials for parametric chirped pulse amplification (PCPA) substantially reduces the required pump peak power and pump brightness, allowing exploitation of spatially-multimode and long duration pump pulses. It also removes restrictions on pump wavelength and amplification bandwidth. This allows substantial simplification in pump laser design for a high-energy PCPA system and, consequently, the construction of compact diode-pumped sources of high-energy ultrashort optical pulses. Also, this allows elimination of gain-narrowing and phase-distortion limitations on minimum pulse duration, which typically arise in a chirped pulse amplification system. One example of a compact source of high-energy ultrashort pulses is a multimode-core fiber based PCPA system. Limitations on pulse energy due to the limited core size for single-mode fibers are circumvented by using large multimode core. Limitations on pulse duration and beam quality due to multimode core are circumvented by using a PCPA scheme. Additionally, the large core of the multimode fiber facilitates cladding-pumping by inexpensive and high-power multiple-mode laser diodes.

Quasi-phase-matched parametric chirped pulse amplification systems

Recent invention of longitudinally chirped volume Bragg gratings has dramatically changed a design of high power femtosecond lasers. Replacing of bulky pairs of conventional surface gratings with compact and robust chirped volume Bragg gratings for stretching and compression of laser pulses in chirped-pulse-amplification systems enabled decrease of size and weight of those systems by several times. The methods and devices enable substantial increase of stretching time and compression to shorter pulses, enhancement of stretched and compressed beams quality by stationary or dynamic shaping of gratings, and shaping of laser pulses in both temporal and spectral domains.

Laser pulse temporal, spectral and spatial shaping devices based on volume diffractive gratings with spatially variable parameters

A beam combining system suitable of pulsed fiber laser applications is able to produce non-spatial-dispersive beams using an highly efficient filter, such as a multilayer dielectric filter, in transmission and reflection configurations. The techniques therefore can overcome constraints on laser line-width and beam width and allow for more stable systems for high peak power pulsed laser energy, such as may be used in extreme ultraviolet lithography and other applications.

Spatial-dispersion-free spectral combining of pulsed high peak power fiber laser beams

A composite waveguide includes a central core configured to transmit a plurality of modes and at least one side core helically wound about the central core and configured to be selectively coupled to at least a portion of the plurality of modes in the central core.

Composite waveguide

A modular, compact and widely tunable laser system for the efficient generation of high peak and high average power ultrashort pulses. System compactness is ensured by employing efficient fiber amplifiers, directly or indirectly pumped by diode lasers. Dispersive broadening is introduced by dispersive pulse stretching in the presence of self-phase modulation and gain, resulting in the formation of high-power parabolic pulses. In addition, dispersive broadening is also introduced by simple fiber delay lines or chirped fiber gratings. The phase of the pulses in the dispersive delay line is controlled to quartic order by the use of fibers with varying amounts of waveguide dispersion or by controlling the chirp of the fiber gratings. After amplification, the dispersively stretched pulses can be re-compressed to nearly their bandwidth limit by the implementation of another set of dispersive delay lines. A particularly compact implementation of the whole system uses fiber oscillators in conjunction with fiber amplifiers.

Modular, high energy, widely-tunable ultrafast fiber source

The invention describes techniques for the control of the spatial as well as spectral beam quality of multi-mode fiber amplification of high peak power pulses as well as using such a configuration to replace the present diode-pumped, Neodynium based sources. Perfect spatial beam-quality can be ensured by exciting the fundamental mode in the multi-mode fibers with appropriate mode-matching optics and techniques. The loss of spatial beam-quality in the multi-mode fibers along the fiber length can be minimized by using multi-mode fibers with large cladding diameters. Near diffraction-limited coherent multi-mode amplifiers can be conveniently cladding pumped, allowing for the generation of high average power. Moreover, the polarization state in the multi-mode fiber amplifiers can be preserved by implementing multi-mode fibers with stress producing regions or elliptical fiber cores These lasers find application as a general replacement of Nd: based lasers, especially Nd:YAG lasers. Particularly utility is disclosed for applications in the marking, micro-machining and drilling areas.

Microchip&#x2014;Yb fiber hybrid optical amplifier for micro-machining and marking

A modular, compact and widely tunable laser system for the efficient generation of high peak and high average power ultrashort pulses. Modularity is ensured by the implementation of interchangeable amplifier components. System compactness is ensured by employing efficient fiber amplifiers, directly or indirectly pumped by diode lasers. Dispersive broadening is introduced by dispersive pulse stretching in the presence of self-phase modulation and gain, resulting in the formation of high-power parabolic pulses. In addition, dispersive broadening is also introduced by simple fiber delay lines or chirped fiber gratings, resulting in a further increase of the energy handling ability of the fiber amplifiers. After amplification, the dispersively stretched pulses can be re-compressed to nearly their bandwidth limit by the implementation of another set of dispersive delay lines. To ensure a wide tunability of the whole system, Raman-shifting of the compact sources of ultrashort pulses in conjunction with frequency-conversion in nonlinear optical crystals can be implemented, or an Anti-Stokes fiber in conjunction with fiber amplifiers and Raman-shifters are used.

Microchip-Yb fiber hybrid optical amplifier for micro-machining and marking

A fiber amplifier includes at least one coreless end used for the input or extraction of optical energy. The coreless end has a transverse cross section which differs from the transverse cross section of the core at fiber locations remote from the end, so that the diameter of the input or extracted optical beam at the coreless end can be larger than the diameter of the fiber core, to increase an optical damage threshold of the fiber amplifier.

A composite waveguide comprising a central core and at least one side core helically wound about said central core and in optical proximity to said central core.

Growing community of inventors

Ann Arbor, MI, United States of America

Almantas Galvanauskas