Analog Devices Imi, Inc.

Integrated Micro Instruments, Inc.

Allen W Roessig

William Albert Clark

Mark Alan Lemkin

Thor N Juneau

A movable microstructure includes a first finger set comprising two or more first fingers affixed to a substrate and extending substantially parallel to a defined displacement axis towards a proof-mass. The movable microstructure further includes a second finger set comprising at least one second finger, each member of the second finger set extending substantially parallel to the displacement axis from the proof-mass, terminating between two first fingers. Each second finger is substantially closer to one of the two first fingers between which it terminates. The first finger set, in conjunction with the second finger set, form two terminals of a capacitor. An electrical circuit is included that provides a voltage across the capacitor to generate a position-dependent force, the position-dependent force having a component along an axis substantially orthogonal to the displacement axis, the magnitude of the position-dependent force varying in proportion to displacement along the displacement axis.

Structure for attenuation or cancellation of quadrature error

A position-sense interface with improved transfer characteristics. Electrical position detection circuitry, which may be substantially time-multiplexed or frequency-multiplexed, comprises a differential charge integrator with input-sensed output-driven common mode feedback. By placing sense capacitors in the feedback loop of said differential charge integrator with input-sensed output-driven common mode feedback, improved position sensing linearity is attained. In some embodiments of the invention, a compensating charge is applied to the sense capacitors in a fashion that minimizes the output common mode shift of the opamp. The magnitude of the compensating charge may be preset at a substantially constant level, or derived by a feedback loop that measures the shift in output common mode voltage in response to an excitation signal and adjusts the magnitude of the compensating charge to drive said shift towards zero. The invention has numerous advantages for acceleration measurement in both open-loop and force-balanced accelerometers, as well as rotation rate measurement in a vibratory rate gyroscope. Other applications in which the invention may prove advantageous include: motion detection for an oscillation-sustaining feedback loop; position detection of actuators, including micro-actuators used for effecting controlled motion of a disk-drive read/write head, or effecting controlled motion of an optically active device, such as a positionable mirror for use in fiber-optic data communications; and application of electrostatic forces for large motions.

Position sensing with improved linearity

A microfabricated device includes a substrate having a device layer and substantially filled, isolating trenches; a doped region of material formed by photolithographically defining a region for selective doping of said device layer, selectively doping said region, and thermally diffusing said dopant; circuits on said device layer formed using a substantially standard circuit technology; and at least one structure trench in the substrate which completes the definition of electrically isolated micromechanical structural elements.

Low-resistivity microelectromechanical structures with co-fabricated integrated circuit

Microfabricated structures with trench-isolation using bonded-substrates and cavities

Micro-machined accelerometer with improved transfer characteristics

Microfabricated structures with electrical isolation and interconnections

Generation of mechanical oscillation applicable to vibratory rate gyroscopes

A microfabricated vibratory rate gyroscope to measure rotation includes two proof-masses mounted in a suspension system anchored to a substrate. The suspension has two principal modes of compliance, one of which is driven into oscillation. The driven oscillation combined with rotation of the substrate about an axis perpendicular to the substrate results in Coriolis acceleration along the other mode of compliance, the sense-mode. The sense-mode is designed to respond to Coriolis accelerationwhile suppressing the response to translational acceleration. This is accomplished using one or more rigid levers connecting the two proof-masses. The lever allows the proof-masses to move in opposite directions in response to Coriolis acceleration. The invention includes a means for canceling errors, termed quadrature error, due to imperfections in implementation of the sensor. Quadrature-error cancellation utilizes electrostatic forces to cancel out undesired sense-axis motion in phase with drive-mode position.

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Fremont, CA, United States of America

Allen W Roessig