Watlow Electric Manufacturing Company

Allen Norman Boldt

Kevin Ptasienski

Louis P Steinhauser

Kevin Smith

Cal Thomas Swanson

Mohammad Nosrati

Dennis Stanley Grimard

Sanhong Zhang

Jacob Robert Lindley

Philip Steven Schmidt

Elias Russegger

Kenneth F Fennewald

Gernot Antosch

Martin Wallinger

Gerhard Schefbanker

Matt Kenchel

Wolfgang Poeschl

Eric Ellis

James McMillin

Christopher C Lanham

Wolfgang Pöschl

Shawn Leininger

Gerhard Schefbänker

Reinhardt W Lehnert

William A McDowell, Iii

Frederic Zimmermann

Ray Alan Derler

Peggy Gruenloh

Steve Brncic

Janet Lea Smith

Kevin Robert Smith

A cleaning device includes a porous body and a dispensing reservoir disposed within the porous body. The dispensing reservoir has at least one opening being disposed at a predetermined location along a length of the dispensing reservoir such that a rate at which the solution flows into the porous body varies based specific orientations of the porous body. A perforated fluid supply conduit is also disposed within the porous body and extends alongside the dispensing reservoir, the perforated fluid conduit having a plurality of perforations. The dispensing reservoir and the perforated fluid supply conduit are not directly fluidly coupled.

Cleaning device

A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.

High definition heater system having a fluid medium

A heater system is provided that includes a base functional layer having at least one functional zone. A substrate is secured to the functional member, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer provides lower power than the base functional layer. A component is secured to the tuning layer opposite the substrate, and the substrate defines a thermal conductivity to absorb and dissipate a requisite amount of power from the base functional layer. A control system is also provided that has a plurality of addressable control elements in electrical communication with power lines and with the tuning layer, the control elements providing selective control of the tuning layer zones.

High definition heater and method of operation

A thermal system includes: a base member including at least one fluid passageway in which a two-phase fluid is disposed; a tuning layer secured to the base member; and a control system. The pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning layer includes a plurality of zones. The control system includes a plurality of sets of power lines in communication with the tuning layer, and a plurality of addressable control elements in electrical communication with the power lines and with the tuning layer. The control elements provide selective control of the tuning layer zones.

A method of forming a layered heater assembly includes: forming a plurality of layers onto a substrate, the plurality of layers including a resistive element layer; forming electrical terminations in contact with the resistive element layer; securing a protective cover over the layers using a laser welding process, wherein edges of the protective cover are welded circumferentially around raised end portions of the substrate and welded longitudinally along a slotted portion of the substrate; securing a pair of lead wires to the electrical terminations; and securing a lead cap assembly around the pair of lead wires and to the protective cover using a laser welding process.

Moisture resistant layered sleeve heater and method of manufacture thereof

A heater assembly is provided that includes a substrate having opposed end portions defining raised flanges, a slot extending between the opposed end portions, and opposed chamfered surfaces extending along the slot and across the raised flanges. A plurality of layers are disposed onto the substrate, along with a pair of terminal pads. A protective cover defining at least one aperture is disposed over the layers and is secured to the raised flanges and the opposed chamfered surfaces of the substrate, and the aperture is disposed proximate the terminal pads. A pair of lead wires is secured to the pair of terminal pads, and a lead cap assembly is disposed around the pair of lead wires and is secured to the protective cover.

Methods of manufacturing a heater are provided that generally include forming a laminate having a dielectric layer, a first double-sided adhesive dielectric layer, and a conductive layer. Next, a circuit pattern is created into the conductive layer, and then the circuit pattern is covered with a second double-sided adhesive dielectric layer. The second double-sided adhesive dielectric layer is covered with a sacrificial layer, and then the heater is formed, the heater comprising the dielectric layer, the first double-sided adhesive dielectric layer, the conductive layer, and the second double-sided adhesive dielectric layer. Subsequently, the sacrificial layer is removed.

Method of manufacturing a high definition heater system

An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment, that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.

An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer.

An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.

A heater assembly is provided that includes a substrate having opposed end portions defining raised flanges, a slot extending between the opposed end portions, and opposed chamfered surfaces extending along the slot and across the raised flanges. In one form, a plurality of layers are disposed onto the substrate, along with a pair of terminal pads. A protective cover defining at least one aperture is disposed over the layers and is secured to the raised flanges and the opposed chamfered surfaces of the substrate, and the aperture is disposed proximate the terminal pads. A pair of lead wires is secured to the pair of terminal pads, and a lead cap assembly is disposed around the pair of lead wires and is secured to the protective cover. Methods of manufacturing the heater assembly are also provided in accordance with the present disclosure.

Moisture resistant layered sleeve heater and method of manufacturing thereof

An instrumented heater sleeve is provided that has a plurality of zones, a dielectric layer disposed over an outer surface of the sleeve, a resistive element layer disposed over the first dielectric layer, and a plurality of pairs of lead wires secured to a portion of the resistive element layer. Each pair of lead wires is connected to and corresponds with each of the zones and a protective layer is disposed over the dielectric layer. An amount of power is supplied to each of the zones and adjusted during a test run, or multiple test runs, to achieve a desired temperature profile along a heating target such as a hot runner nozzle. Methods of designing a hot runner nozzle heater using the instrumented heater sleeve are also provided.

Hot runner nozzle heater and methods of manufacture thereof

A modular heater system is provided that includes a heat trace assembly and a connector assembly. The heat trace assembly has a heat trace section that defines a plurality of fins, an insulation jacket surrounding the heat trace section, and at least one terminating member disposed at an end of the heat trace section. The connector assembly has a shell, including a plurality of outer walls and inner walls defining cavities therebetween, and a fitting heater assembly that includes a fitting adapter, a heat trace section disposed around the fitting adapter, and an outer casing disposed around the fitting adapter.

Modular heater systems

A heat trace assembly is provided that includes a heat trace section, an insulation jacket surrounding the heat trace section, and a plurality of standoffs disposed between the heat trace section and the insulation jacket. A corresponding plurality of passageways are formed between the heat trace section and the insulation jacket and between the plurality of standoffs. The standoffs can be a part of the insulation jacket and/or the heat trace section, and the standoffs can furthermore be integrally formed with or separately attached to the insulation jacket and/or the heat trace section.

A hot runner nozzle heater is provided that includes a sleeve defining a slot extending along a length of the sleeve. A first dielectric layer is disposed over an outer surface of the sleeve, and a resistive element layer is disposed over the first dielectric layer, wherein the resistive element layer defines a resistive circuit pattern that is preferably formed by a laser trimming process. A pair of terminal leads are secured to a portion of the resistive element layer thus defining a termination area, and the termination area is positioned proximate the slot and away from the proximal end and the distal end of the sleeve. A second dielectric layer is disposed over the resistive element layer but not over the termination area, a third dielectric layer is disposed over the termination area, and a protective layer disposed over the second dielectric layer and the third dielectric layer.

Growing community of inventors

Kirkwood, MO, United States of America

Allen Norman Boldt