Average Co-Inventor Count = 4.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (3 from 41,004 patents)
3 patents:
1. 11569125 - Etch profile control of interconnect structures
2. 11195750 - Etch profile control of interconnect structures
3. 10707123 - Etch profile control of interconnect structures