Asml Netherlands B.v.

Allard Eelco Kooiker

Bastiaan Andreas Wilhelmus Hubertus Knarren

Jan-Gerard Cornelis Van Der Toorn

Johannes Hubertus Antonius Van De Rijdt

Han Willem Hendrik Severt

Johannes Henricus Wilhelmus Jacobs

Thibault Simon Mathieu Laurent

Haico Victor Kok

Yixiang Wang

Jan Steven Christiaan Westerlaken

Yuri Johannes Gabriël Van De Vijver

Ying Luo

Jurgen Van Soest

Shibing Liu

Bohang Zhu

Johannes Antonius Maria Van De Wal

Jeroen Gertruda Antonius Huinck

Wilhelmina Margareta Jozef Hurkens-Mertens

Yohann Bruno Yvon Teillet

Raymond Turk

Arno Maria Wellink

Chia-Yao Chen

Robbert Jan Voogd

Peter Paul Hempenius

Ronald Van Der Wilk

Wouter Onno Pril

Suzanne Johanna Antonetta Geertruda Cosijns

Jan Peter Baartman

Michaël Johannes Christiaan Ronde

Michael Johannes Christiaan Ronde

Bryan Tong-Minh

Jef Goossens

Petrus Wilhelmus Vleeshouwers

Robbert-Jan Voogd

Nico Antonius Hubertus Johannes Boonen

Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.

Object table comprising an electrostatic clamp

A stage apparatus for a particle-beam apparatus is disclosed. A particle beam apparatus may comprise a conductive object and an object table, the object table being configured to support an object. The object table comprises a table body and a conductive coating, the conductive coating being provided on at least a portion of a surface of the table body. The conductive object is disposed proximate to the conductive coating and the table body is provided with a feature proximate to an edge portion of the conductive coating. Said feature is arranged so as to reduce an electric field strength in the vicinity of the edge portion of the conductive coating when a voltage is applied to both the conductive object and the conductive coating.

Stage apparatus suitable for a particle beam apparatus

Disclosed is a stage apparatus comprising: an object support configured to support an object; a positioning device configured to position the object support; a first connection arrangement configured to connect the object support to the positioning device, the first connection arrangement comprising at least one damped connection; and a second connection arrangement configured to connect the object support to the positioning device, the second connection arrangement comprising at least one substantially rigid connection.

Stage apparatus suitable for electron beam inspection apparatus

An encoder includes an optical component and an enclosing device having a first surface portion and a second surface portion. The first surface portion is arranged to receive from an ambient environment a first radiation beam. The second surface portion is arranged to receive from the ambient environment a second radiation beam. The optical component is arranged to combine the first and second radiation beams. The enclosing device is arranged to propagate the first radiation beam along a first path. The first path is between the first surface portion and the optical component. The enclosing device is arranged to propagate the second radiation beam along a second path. The second path is between the second surface portion and the optical component. The enclosing device is arranged to enclose a space, so as to isolate the first path and the second path from the ambient environment.

Encoder, position measurement system and lithographic apparatus involving an enclosing device

A sensor for use in lithographic apparatus of an immersion type and which, in use, comes into contact with the immersion liquid is arranged so that the thermal resistance of a first heat path from a transducer of the sensor to a temperature conditioning device is less than the thermal resistance of a second heat flow path from the transducer to the immersion liquid. Thus, heat flow is preferentially towards the temperature conditioning device and not the immersion liquid so that temperature-induced disturbance in the immersion liquid is reduced or minimized.

Sensor, lithographic apparatus and device manufacturing method

A detector module () is described that includes at least one detector () for sensing photon radiation, an electronic circuit () coupled to the at least one detector (), and a housing () having a first and a second body (), each having a bottom part () and an at least partially cylindrical part () extending from the bottom part (), wherein the at least partially cylindrical part () of the first body () is thermally coupled with the at least partially cylindrical part () of the second body (), wherein the at least partially cylindrical part () of the first body () extends towards the bottom part () of the second body (), and wherein the electronic circuit () is arranged inside the housing (). A lithographic apparatus including the detector module () is also described.

Detector module, cooling arrangement and lithographic apparatus comprising a detector module

A cooling arrangement is described and includes a heat sink having a first thermal contact surface, an object having a second thermal contact surface and a resilient wall. The first thermal contact surface and the second thermal contact surface face each other and define a gap. The resilient wall is part of an enclosure that surrounds a space at least comprising the gap, and the cooling arrangement includes a facility to maintain a pressure difference between the space and an environment of the cooling arrangement. Additionally, a lithographic apparatus comprising such a cooling arrangement is described.

Cooling arrangement and lithographic apparatus comprising a resilient wall creating a gap between a detector module housing and a heat sink of the cooling arrangement

Growing community of inventors

Waalre, Netherlands

Allard Eelco Kooiker