Facebook Technologies, LLC

Oculus, Vr, LLC

Meta Platforms Technologies, LLC

Allan Pourchet

Pooya Saketi

Daniel Brodoceanu

Oscar Torrents Abad

Celine Claire Oyer

Vincent Brennan

Patrick Joseph Hughes

William Padraic Henry

Ali Sengül

Padraig Hughes

Christopher Percival

Jeb Wu

Zheng Sung Chio

Chao Kai Tung

Céline Claire Oyer

Joseph O'Keeffe

Karsten Moh

Tennyson Nguty

Remi Alain Delille

Tennyson Nquty

Celine Oyer

A method for manufacturing LED devices is provided. The method comprises forming an epitaxial layer on a starter substrate, the epitaxial layer having a first surface that interfaces with the starter substrate and a second surface opposite to the first surface; establishing an adhesive bond between the second surface of the epitaxial layer and a carrier substrate having a pre-determined light transmittance; etching away the starter substrate; etching away part of the epitaxial layer to form a plurality of light emitting diode (LED) dies on a third surface of the epitaxial layer opposite to the second surface; establishing one or more conductive bonds between selected one or more LED dies, from the plurality of LED dies, and a backplane; weakening the adhesive bond between the second surface of the epitaxial layer and the carrier substrate; and moving the carrier substrate away from the backplane.

Light emitting diodes manufacture and assembly

A laser light is used to modify the surface of the gallium semiconductor layer of an LED. The parameters of the laser are selected so that the laser interacts with the gallium semiconductor layer in a desired manner to yield the desired surface properties. For example, if a particular surface roughness is desired, the power of the laser light is selected so that the laser light penetrates the gallium semiconductor layer to a depth matching the desired surface roughness. The same principles can also be applied in a process that creates features such as trenches, pits, lenses, and mirrors on the gallium semiconductor layer of an LED. The laser projector is operated to irradiate a region of the gallium semiconductor layer to create a region of metallic gallium. The desired surface roughness and the different features can advantageously improve the beam collimation, light extraction, and other properties of the LED.

LED surface modification with ultraviolet laser

Embodiments relate to the design of an electronic device capable having flexible interconnects that connect together a first body and a second body of the electronic device. The flexible interconnects allow the electrical device to better withstand thermal-mechanical stress during fabrication of the electronic device and user usage of the electronic device.

Flexible interconnect using conductive adhesive

Disclosed herein are techniques relating to wafer-to-wafer bonding for manufacturing light-emitting diodes (LEDs). In some embodiments, a method includes reducing bowing of a layered structure including a semiconductor material and a substrate on which the semiconductor material is formed by generating breakages, fractures, or at least one region of weakened bonding within the layered structure. The method also includes bonding a base wafer to the semiconductor material, removing the substrate from the semiconductor material, and forming a plurality of trenches through the semiconductor material to produce a plurality of LEDs.

Reducing bowing of materials before wafer-to-wafer bonding for LED manufacturing

Embodiments relate to a method for fabricating a light-emitting-diode (LED). A metal layer is deposited on a p-type semiconductor. The p-type semiconductor is on an n-type semiconductor. The metal layer is patterned to define a p-metal. The p-type semiconductor is etched using the p-metal as an etch mask. Similarly, the n-type semiconductor is etched using the p-metal and the p-type semiconductor as an etch mask to define individual LEDs.

Self-alignment of micro light emitting diode using planarization

A light emitting diode (LED) array is formed by bonding an LED substrate to a backplane substrate via magnetized interconnects. The backplane substrate may include circuits for driving the LED array, and each of the magnetized interconnects electrically connect a LED device to a corresponding circuit of the backplane substrate. The magnetized interconnects may be formed by electrically connecting first structures protruding from the backplane substrate to second structures protruding from the LED substrate. At least one of the first structure and the second structure includes ferromagnetic material configured to secure the first structure to the second structure.

Magnetic clamping interconnects

A light-emitting diode (LED) array is formed by bonding an LED chip or wafer to a backplane substrate via curved interconnects. The backplane substrate may include circuits for driving the LED's. One or more curved interconnects are formed on the backplane substrate. A curved interconnect may be electrically connected to a corresponding circuit of the backplane substrate, and may include at least a portion with curvature. The LED chip or wafer may include one or more LED devices. Each LED device may have one or more electrical contacts. The LED chip or wafer is positioned above the backplane substrate to spatially align electrical contacts of the LED devices with the curved interconnects on the backplane substrate. The electrical contacts are bonded to the curved interconnects to electrically connect the LED devices to corresponding circuits of the backplane substrate.

Curved pillar interconnects

A method of manufacturing light emitting diode (LED) devices is provided. In one example, the method comprises: forming a plurality of LED dies on a starter substrate, each of the plurality of LED dies including a device-side bump; moving, using a pick up tool (PUT), the starter substrate and the plurality of LED dies towards a backplane, the backplane including a plurality of backplane-side bumps; establishing the conductive bonds between the device-side bumps of the plurality of LED dies and the backplane-side bumps of the backplane at the plurality of contact locations; and operating the PUT to release the starter substrate to enable transferring of the plurality of LED dies to the backplane.

Manufacture of semiconductor display device

A light emitting diode (LED) device includes a semiconductor layer and one or more portions of a wafer on which the semiconductor layer was formed, the other portions of the wafer having been removed by an etching process. The semiconductor layer has a front surface that includes a light emitting area. The remnants of the wafer on which the semiconductor layer are disposed on the front surface of the semiconductor layer and define a trench. The trench is positioned such that the light emitting area emits light into the trench. The remnants of the wafer make the LED device more robust and the trench may reduce crosstalk with adjacent LED devices.

Micro light emitting diode with remnants of fabrication substrate for structural support

A laser is used to induce bonding of LED contact pads with corresponding substrate contact pads on a display substrate. The wavelength of the laser light and the material used for the contact pads are both selected so that the laser light is capable of melting the contact pads. For example, the laser light has a wavelength of between 220 nm and 1200 nm, and the contact pads are formed of a copper-tin oxide (CuSn). Furthermore, the system may be configured to shine the laser light through a number of other components, such as the pick-up head and the LED itself. These materials can be formed of materials that do not absorb the energy of the laser light. Bonding the contacts with a laser in this manner allows for faster heating and cooling times, avoids reheating of previously bonded contact pads, and reduces thermal expansion of the display substrate.

Laser-induced selective heating for microLED placement and bonding

To manufacture a display using light emitting diodes (LEDs), the LEDs are transferred from fabrication substrates where they are fabricated to a target substrate (e.g., a backplane) that forms part of a display. The LEDs are transferred in three stages: first from fabrication substrates to hard handles, subsequently from the hard handles to a carrier substrate, and last from the carrier substrate to the target substrate. The LEDs are placed onto the carrier substrate to form pixel arrangements. One or more pick-up tools are used to transfer the LEDs. Switchable adhesives are used to facilitate the transfer of the LEDs from the fabrication substrates to the target substrate.

Manufacture LED displays using temporary carriers

Methods and apparatus for use in the manufacture of a display element. Some embodiments include a method for selective pick up of a subset of a plurality of electronic devices adhered to a handle layer. The method comprises modifying a level of adhesion between one or more electronic devices of the plurality of electronic devices adhered to the handle layer, such that the subset of the plurality of electronic devices has a level of adhesion to the handle layer that is less than a force applied by a pick up tool, PUT. This enables selective pick up of the subset of the plurality of electronic devices from the handle layer by the PUT.

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Cork, Ireland

Allan Pourchet