Mks Instruments, Inc.

Lam Research Corporation

Axcelis Technologies, Inc.

Flodesign Sonics, Inc.

Ivenix, Inc.

Eaton Corporation

Varian Semiconductor Equipment Associates, Inc.

Edwards Limited

Ultratech, Inc.

Cynosure, Inc.

Fresenius Kabi Usa, LLC

Ali Shajii

Jesse E Ambrosina

Siddharth P Nagarkatti

Nicholas Kottenstette

Andrew Cowe

John A Smith

Souheil Benzerrouk

Daniel Alexander Smith

William Robert Entley

Xing Chen

Richard Alan Gottscho

William M Holber

Matthew Mark Besen

William R Clark

Paul Michael Meneghini

Mark Attwood

Jonathan Henry Palk

Jeffrey P Hebb

Timothy Roger Robinson

Mark Philip Longson

Bart Lipkens

Dane Mealey

Benjamin G Powers

Michael Kishinevsky

Ronald Musiak

Bora Akgerman

Gordon Hill

Daniel Goodman

Douglas A Brown

David Sonnenshein

David Tao

Mathias Koch

Hossein Zarrin

Timothy E Kalvaitis

William S McKinney, Jr

Donald K Smith

Junhua Ding

Rafael Armando Sierra

Digby Pun

James Henry Boll

Richard Shaun Welches

Jeffrey Franklin Simon

Kaveh H Zarkar

Ken Tran

Ilya Bystryak

David Matthew Burtner

James McWhirter

Jeffrey Vincent Anastas

Daniel B Masse

Louis R Slamka

Samuel Bruce

James Boll

Robert D McCarthy

Raymond Ellis

Ronald W Collins, Jr

John Artis

Leonard Myatt

Isao Suzuki

Brian Matthews

Daniel Masse

Michael McBrien

ShouQian Shao

Jesse Ambrosnia

R Leonard Myatt

John Danis

Gregory E Stratoti

Jeffrey Simon

Robert D Mccarthy

Electrosurgical systems and components thereof configured to deliver RF energy to a target site of a human or other animal patient with selectable RF energy delivery profiles, temperature sensors and controls, and/or electrodes configured to more uniformly or effectively delivery energy to target tissue.

Methods and apparatus for controlled RF treatments and RF generator system

Aspects of the disclosure are directed to an apparatus for separating a second fluid or a particulate from a host fluid. That apparatus comprises a flow chamber with at least one inlet and at least one outlet. A drive circuit configured to provide a drive signal to a filter circuit configured to receive the drive signal and provide a translated drive signal. An ultrasonic transducer is cooperatively arranged with the flow chamber, and transducer includes at least one piezoelectric element configured to be driven by the current drive signal to create an acoustic standing wave in the flow chamber. At least one reflector opposing the ultrasonic transducer to reflect acoustic energy.

Electronic configuration and control for acoustic standing wave generation

An acoustic standing wave is utilized to separate components from a multi-component fluid, such as oil from an oil-water mixture, or cells entrained in a fluid, in a fluid flow scheme with an acoustophoresis device. For example, the flow scheme and device allows for trapping of the oil as the oil coalesces, agglomerates, and becomes more buoyant than the water. A driver and controller for the acoustophoretic device accommodate variable loading as the components are separated, thereby improving separation efficiency.

Driver and control for variable impedence load

A device and method for changing a fluid from one state to another state, the states comprising a liquid and a vapour state are disclosed. The device comprises: an inlet configured to receive the fluid in a first state; an outlet configured to output the fluid in a second state; and a conduit connecting the inlet to the outlet. The conduit is configured such that a resistance to flow changes along at least a portion of a flow axis within the conduit. The device further comprises a controller configured to control a location of a region within the portion of the conduit in which the fluid changes state by controlling at least one of a temperature of the fluid and a pressure at at least one of the inlet and the outlet.

Device and method for controlling a phase transition of a fluid between liquid and vapour states

In accordance with one embodiment, a controller in a fluid delivery system controls magnitudes of pressure in a first volume and a second volume. The first volume is of a known magnitude. The second volume is of an unknown magnitude and varies. The controller estimates a temperature of gas in the first volume and a temperature of gas in the second volume based on measurements of pressure in the first volume and measurements of pressure in the second volume. The controller then calculates a magnitude of the second volume based on measured pressures of the gases and estimated temperatures of gases in the first volume and the second volume.

Fluid flow measurement and control

A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber, multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites and multiple plasma chamber outlets coupling the plasma chamber to a process chamber. Each one of the plasma chamber outlets having a respective plasma restriction. A system and method for generating a plasma are also described.

Systems, methods and apparatus for choked flow element extraction

A processing chamber including multiple plasma sources in a process chamber top. Each one of the plasma sources is a ring plasma source including a primary winding and multiple ferrites. A plasma processing system is also described. A method of plasma processing is also described.

Distributed multi-zone plasma source systems, methods and apparatus

Distributed, concentric multi-zone plasma source systems, methods and apparatus

In accordance with another embodiment, a controller in a fluid delivery system initiates drawing fluid into a chamber of a diaphragm pump. During a delivery phase of pumping the fluid in the chamber to a target recipient, the controller applies pressure to the chamber. At multiple different times during the delivery phase, the controller temporarily discontinues application of the pressure to the chamber to calculate how much of the fluid in the chamber has been pumped to the target recipient.

A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber and multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites. A system and method for generating a plasma are also described.

A plasma flood gun for an ion implantation system includes an insulating block portion and first and second conductive block portions disposed on opposite sides of the insulating block portion. Conductive straps can be coupled between the first and second conductive block portions. The conductive block portions and the central body portion include recesses which form a closed loop plasma chamber. A power source is coupled to the conductive block portions for inductively coupling radio frequency electrical power into the closed loop plasma chamber to excite the gaseous substance to generate a plasma. The respective recess in the second conductive block portion includes a pinch region having a cross-sectional dimension that is smaller than a cross-sectional area of portion of the closed loop plasma chamber directly adjacent the pinch region. The pinch region can be positioned immediately adjacent an outlet portion formed in the second conductive block portion.

Pinched plasma bridge flood gun for substrate charge neutralization

A movable microchamber system with a gas curtain is disclosed. The microchamber system has a top member with a light-access feature and a stage assembly that supports a substrate to be processed. The stage assembly is disposed relative to the top member to define a microchamber and a peripheral microchamber gap. An inert gas is flowed into the peripheral microchamber gap to form the gas curtain just outside of the microchamber. The gas curtain substantially prevents reactive gas in the ambient environment from entering the microchamber when the stage assembly moves relative to the top member.

Movable microchamber system with gas curtain

Growing community of inventors

Canton, MA, United States of America

Ali Shajii