Kla Tencor Corporation

Other

Kla Corporation

Ali R Ehsani

Yung-Ho Alex Chuang

John Fielden

Gildardo Rios Delgado

David Lee Brown

Jehn-Huar Chern

Damon Floyd Kvamme

Ali Shambayati

Garry Allen Rose

Joseph Walsh

I-Fan Wu

Eduardo Soto

Mohammad R Ehasani

Bernd Burfeindt

Christopher Davis

David L Brown

Joseph Armstrong

Kent McKernan

David Jalil Zare

An enclosure surrounding the optical component can be connected with a vapor source. The vapor source can provide a vapor to the enclosure with a vapor level from 500 ppm to 15000 ppm. The concentration of vapor in the enclosure can increase the lifespan of the optical component in the enclosure.

Vapor as a protectant and lifetime extender in optical systems

An inspection system including an optical system (optics) to direct light from an illumination source to a sample, and to direct light reflected/scattered from the sample to one or more image sensors. At least one image sensor of the system is formed on a semiconductor membrane including an epitaxial layer having opposing surfaces, with circuit elements formed on one surface of the epitaxial layer, and a pure boron layer and a doped layer on the other surface of the epitaxial layer. The image sensor may be fabricated using CCD (charge coupled device) or CMOS (complementary metal oxide semiconductor) technology. The image sensor may be a two-dimensional area sensor, or a one-dimensional array sensor. The image sensor can be included in an electron-bombarded image sensor and/or in an inspection system.

Back-illuminated sensor with boron layer

An inspection system including an optical system (optics) to direct light from an illumination source to a sample, and to direct light reflected/scattered from the sample to one or more image sensors. At least one image sensor of the system is formed on a semiconductor membrane including an epitaxial layer having opposing surfaces, with circuit elements formed on one surface of the epitaxial layer, and a pure boron layer on the other surface of the epitaxial layer. The image sensor may be fabricated using CCD (charge coupled device) or CMOS (complementary metal oxide semiconductor) technology. The image sensor may be a two-dimensional area sensor, or a one-dimensional array sensor. The image sensor can be included in an electron-bombarded image sensor and/or in an inspection system.

An image sensor for short-wavelength light and charged particles includes a semiconductor membrane, circuit elements formed on one surface of the semiconductor membrane, and a pure boron layer on the other surface of the semiconductor membrane. This image sensor has high efficiency and good stability even under continuous use at high flux for multiple years. The image sensor may be fabricated using CCD (charge coupled device) or CMOS (complementary metal oxide semiconductor) technology. The image sensor may be a two-dimensional area sensor, or a one-dimensional array sensor. The image sensor can be included in an electron-bombarded image sensor and/or in an inspection system.

A protective alarm system for encompassing an area to be protected, such as a swimming pool, includes an enclosure arrangement having at least one and preferably a plurality of flexible hoses that are filled with fluid and substantially enclose or surround the perimeter of the area to be protected. The protective alarm system also includes a detector mechanism connected to the enclosure arrangement and capable of detecting change in the fluid pressure caused by transfer of the weight of a person to compress the hose by stepping thereon. The protective alarm system further includes an alarm device connected to the detector mechanism and operable to generate an alarm signal in response to detection by the detector mechanism of a change in the fluid pressure in the hoses.

Alarm system for enclosing and protecting an area

Growing community of inventors

San Ramon, CA, United States of America

Ali R Ehsani