International Business Machines Corporation

Ali Afzali-Azdakani

Hariklia Deligianni

Stephen Mark Rossnagel

Dario Leonardo Goldfarb

Gustavo Alejandro Stolovitzky

Stefan Harrer

Stanislav Polonsky

Hongbo Peng

Xiaoyan Shao

Shafaat Ahmed

The present invention provides a method of forming an electrode having reduced corrosion and water decomposition on a surface thereof. A conductive layer is deposited on a substrate. The conductive layer is partially oxidized by an oxygen plasma process to convert a portion thereof to an oxide layer thereby forming the electrode. The oxide layer is free of surface defects and the thickness of the oxide layer is from about 0.09 nm to about 10 nm and ranges therebetween, controllable with 0.2 nm precision.

Forming an electrode having reduced corrosion and water decomposition on surface using a custom oxide layer

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Ossining, NY, United States of America

Ali Afzali-Azdakani