Huettinger Elektronik Gmbh & Co. Kg

Alfred Trusch

Peter Wiedemuth

Markus Bannwarth

Martin Steuber

Gerhard Zaehringer

Lothar Wolf

Sven Axenbeck

Gerhard Zähringer

Dieter Meier

A plasma process machine includes at least two electrodes disposed in a processing chamber and in contact with targets, an alternating current source connected to supply power to the electrodes, and a power delivery controller adapted to control power delivered by the alternating current source to the electrodes. The power delivery controller is configured to determine a control value from a comparison between actual power delivery as detected by a detector and a desired power delivery, and to adjust power delivery based on the control value.

Power delivery control and balancing between multiple loads

New methods are used for detecting arcs in a plasma process that is fed by, for example, a freely oscillating AC generator with an output signal of the AC generator for supplying power. The method includes measuring or determining a reference value that is based on a time response of the output signal or of an internal signal of the AC generator relating to the output signal. The methods also include comparing the reference value with a threshold value and detecting an arc when a predetermined result of the comparison is obtained.

Method of arc detection

Growing community of inventors

Breisach am Rhein, Germany

Alfred Trusch