Wacker-chemitronic Gesellschaft Fur Elektronik-grundstoffe Mbh

Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag

Alfred Pardubitzki

Wilfried Von Ammon

Erich Dornberger

Hans Adolf Gerber

Georg Hochgesang

Herber Weidner

Werner Zipf

Manfred Schmiedlindl

Arthur Schweighofer

Apparatus for producing a single crystal of semiconductor material in accance with the Czochralski method, has a cooling means which cools the growing single crystal and is constructed in two parts, The first is an upper part duct system through which a liquid coolant flows. The second is a lower part which is a heat-conducting cooling body.

Apparatus for producing a single crystal

A wafer holding device including a frame (2) which surrounds a wafer (1) ch is received without contact, which can be moved with the wafer having at least three holding elements (3) which are directed toward the outside circumference of the wafer and which can be changed from a holding position to a release position. The wafer can be supported in the holding device during many steps associated with movement in the production process so that a multiplicity of gripping and release operations which stress the wafer surface are unnecessary.

Holding device and method for treating wafer-like objects, and a method

Growing community of inventors

Burghausen, Germany

Alfred Pardubitzki