Centre National De La Recherche Scientifique

Jobin Yvon S.a.

Alfred Hofrichter

Bernard Drevillon

Dmitri Kouznetsov

Pavel Bulkine

A method for characterizing or controlling the production of a thin-layered component using optical methods. Acquired signals Sand Sare processed in order to obtain parameters x, &#x2208; of the deposited layers. The stacking is represented by the product of two Abeles matrices for each direction of polarization s (perpendicular to the incidence plane) and p (parallel to the incidence plane): a known matrix Morepresenting the support and matrix dMrepresenting a thin transparent layer being deposited. The signal variations measured, dSand dS, are inverted to obtain thickness x and dielectric constant &#x2208; of the thin layer by the following operations: Taylor expansion as a function of variation dx of thickness x of the thin layer of the coefficients of matrix dM; the coefficients of matrix Mare calculated each in the form A(&#x2208;)dx+B(&#x2208;)dx+C and the relation S=A(&#x2208;) dx+B(&#x2208;) dx+Cis thereby deduced which connects signals Sand Sto parameters &#x2208; and dx; dx is eliminated and a master function P(&#x2208;)=0 is thereby deduced; the equation is solved and the solutions are selected corresponding to values that are physically plausible in order to measure &#x2208; and use the &#x2208; value obtained to determine dx.

Method for characterizing or controlling the production of a thin-layered component using optical methods

The invention concerns a method for treating a surface for the protection and functionalisation of polymers ( ) by gas plasma deposit in a confined chamber ( ) of one or several silicon alloy layers ( ). The silicon alloy is selected among silicon and its oxides, nitrides, oxynitrides; the deposit is performed at a temperature less than the degradation temperature of the polymer, and a physico&mdash;chemical surface pre-treatment by plasma is performed in the same chamber before the silicon alloy is deposited; the pre-treatment consisting in a surface treatment comprising etching a surface zone of the polymer and step which consists in depositing a polymeric carbon compound.

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Paris, France

Alfred Hofrichter