Mks Instruments, Inc.

Alfred A Funari

Gerardo A Brucker

Timothy C Swinney

Michael N Schott

Brandon J Kelly

Kristian S Schartau

A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

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Fort Collins, CO, United States of America

Alfred A Funari