Other

Leybold Aktiengesellschaft

Alfons Zoeller

Dan M Goebel

Robert W Conn

Gregor A Campbell

Heinrich Gruenwald

Karl Matl

Joerg Terhuerne

Hans-Georg Betz

Rainer Goetzelmann

Peter Sommerkamp

Friedrich Scheerer

An adhesive coating with optical and/or mechanical functions is applied to a PMMA substrate surface, a organic compound which is polymerized by radicals being used as the adhesive-providing layer. The coating with the optical and/or mechanical function(s) is obtained after radical-induced polymerization of the adhesive-providing layer.

Process for producing an adhesive coating on polymethyl methacrylate (PMMA) substrate surfaces

Apparatus for coating substrates 31, 31', . . . in a vacuum chamber 2 including a substrate carrier 30 disposed therein and a device 29 for generating a first plasma cloud 28 and, further, including magnets 26, 27 directing the plasma cloud 28 onto the surface of the substrates 31, 31' . . . wherein this device for generating the plasma cloud 28 has an election emitter 11 and a downstream tubular anode 38, the anode has an inlet 10 for the process gas to ignite the plasma and, further, the device is provided with magnets 4, 7 for directing and guiding the plasma through the anode tube 38 into the process chamber 43 and including a device for generating atoms, molecules or clusters of the materials for producing a layer on the substrates 31, 31', . . . , preferably an electron beam evaporator 37 from which the evaporated or sputtered material 33 can be directly applied onto the substrates 31, 31' . . . . A second plasma 60 is generated between the crucible 45 of the electron beam evaporator 37 and the anode tube 38 of the plasma source 29 by applying a potential difference between the plasma source 29 and the vacuum chamber 2.

Apparatus for coating substrates

Growing community of inventors

Bad Soden-Salmuenster, Germany

Alfons Zoeller