Tokyo Electron Limited

L3harris Technologies, Inc.

Supercritical Systems, Inc.

Alexei Sheydayi

Jon D Burnsed

Thomas Robert Sutton

James Remus

Aspects of the present disclosure relate generally to night-vision systems and more specifically to an integrated flex circuit. One example illustrated herein includes a method of upgrading a night-vision system. The method may include attaching a flex circuit to an intensifier module, in which the flex circuit includes one or more light detectors. The method may include inserting the intensifier module into a housing and folding the flex circuit to expose the one or more light detectors.

Integrated micro-display module with flex circuitry

Aspects of the present disclosure relate generally to night-vision systems and more specifically to an integrated micro-display module with a flex circuit. One example illustrated herein includes a method of upgrading a night-vision system. The method may include attaching a flex circuit to an intensifier module, in which the flex circuit includes one or more light detectors and extending beyond a leading edge of the intensifier module. The method may include inserting the intensifier module into a housing and folding the flex circuit to expose the one or more light detectors. The method may further include optically coupling a display unit to an output side of an intensifier module of the night vision system. The display unit may be configured to display graphical content in a field of view together with night-vision images from an output of the intensifier module of the night-vision system.

A modified nightvision system. The nightvision system includes an intensifier module configured to intensify received light input into the intensifier module. The intensifier module has an input side configured to receive photons of the received light and an output side configured to output intensified light resulting from the received light. The night vision system includes an added display unit proximate the output side of the intensifier module, the display unit configured to output graphical content. The night vision system includes an added beam combiner optically coupled to the display unit and the output side of the intensifier module. The beam combiner is configured to combine the intensified light and graphical content. The night vision system includes an eyepiece optically coupled to the beam combiner. The eyepiece is configured to receive the combined intensified light and graphical content and to provide the combined intensified light and graphical content to a user.

Nightvision with integrated micro-display module

An isolation valve is preferably applied to the semiconductor industry for sealing a process vessel and also operates effectively at plus-atmospheric pressures. A double containment gate valve assembly includes a housing and a movable head assembly within the housing. The housing includes a first access opening and a second access opening. The head assembly is configurable into a first position where an access path through the first and second access openings is clear, and a second position where the access path is blocked.

Gate valve for plus-atmospheric pressure semiconductor process vessels

An isolated semiconductor wafer platen is disclosed for use in high pressure processing. The use of vacuum chucking for holding a semiconductor wafer during processing is well known in the art and can be applied to high pressure systems as well, but some difficulties can arise under high pressure processes. Small deflections in even very thick metal support platens can lead to backside wafer wear, platen abrasion, and even breakage of semiconductor wafers. This invention discloses a method to eliminate the transfer of flexure inherent in high pressure vessel walls, yet still retain the vacuum chucking method.

Method and apparatus for clamping a substrate in a high pressure processing system

A valve for redirecting flow in a supercritical fluid or other high pressure processing system is disclosed. In high pressure supercritical carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a major hurtle in providing clean equipment and clean wafers. A clean flow diverting valve is provided having no grease or other contaminants, and having no rubbing seal surfaces, but rather incorporates a magnetically coupled valve actuator to move a ball or other valve seat for diverting flow between a common port and alternative switched ports in a non-rubbing, non-contact manner. The valve is useful in semiconductor wafer high pressure processing tools for redirecting flow from a common inlet to alternative outlets or for admitting flow from alternative inlets to a common outlet.

Non-contact shuttle valve for flow diversion in high pressure systems

A vacuum chuck for holding a semiconductor wafer during high pressure, preferably supercritical, processing comprising: a wafer holding region for holding the wafer; a vacuum region for applying vacuum to a surface of the wafer, the vacuum region within the wafer holding region; and a material, preferably sintered material, applied within the vacuum region, the material configurable to provide a uniform surface between the surface of the wafer and the wafer holding region, wherein the material is configured to allow vacuum to flow therethrough. The vacuum region preferably comprises at least one vacuum groove. Alternatively, the vacuum region includes at least two vacuum grooves that are concentrically configured on the wafer holding region. The vacuum groove alternatively comprises a tapered configuration. Alternatively, a coating material is applied between the wafer surface and the substantially smooth holding region surface, whereby the coating provides a seal between the wafer and the holding region.

Vacuum chuck utilizing sintered material and method of providing thereof

A closure assembly coupled to a vessel including a chamber and an access port in communication with the chamber, the closure assembly comprising: a door assembly coupled to the vessel and configured to move between an open position and a closed position, the door assembly in contact with the access port at a first location thereby sealing the chamber in the closed position, wherein pressure within the chamber applies a force to the door assembly at the first location. An actuator in moveable contact with the door assembly at a second location, the actuator configured to apply a counteracting force to the door assembly at the second location in response to pressure within the chamber to maintain the door assembly in the closed position. The actuator moves between a non-actuated and actuated position within an actuator bore, the actuator in the actuated position when a desired amount of pressure is applied to the actuator bore.

Growing community of inventors

Gilbert, AZ, United States of America

Alexei Sheydayi