Acreo Swedish Ict Ab

Alexandra Nafari

Gert Ingvar Andersson

David Westberg

Nils Einar Hedenstierna

Milena Anguelova

A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer.

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Gothenburg, Sweden

Alexandra Nafari