Samsung Electronics Co., Ltd.

Alexander Viacheslavovich Shcherbakov

Alexey Dmitrievich Lantsov

Maxim Vladimirovich Riabko

The laser speckle interferometric system includes a memory for storing a measurement result of a correction parameter and models for matching a result of processing the speckle pattern to the parameters of the object and a processor for stabilizing the speckle pattern detected by controlling a condition for detecting the speckle pattern in real time, processing a time-varying function representing a temporal change in the speckle pattern based on the speckle pattern and the parameters and generating data indicating tested parameters.

Laser speckle interferometric system and method for mobile devices

Provided are a method and device for measuring a critical dimension of a nanostructure. The method includes acquiring a reference intensity distribution, in each of a number of spectral bands, of light scattered by at least one reference nanostructure, for each of a number at different positions of the at least one reference nano structure disposed along an optical axis; generating a library of reference intensity distribution arrays based on a number of the reference intensity distributions, determining an intensity distribution of light scattered by a nanostructure under investigation, for each of the number of spectral bands, at each of the number of different positions of the nanostructure under investigation disposed along the optical axis; generating an intensity distribution array by using the determined intensity distributions, and determining information about a critical dimension of the nanostructure under investigation by comparing the intensity distribution array with the library of reference intensity distribution arrays.

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Moscow, Russia

Alexander Viacheslavovich Shcherbakov