Applied Materials Israel Limited

Alexander Veis

Yoram Saban

A method for immersion based inspection, the method includes: (i) receiving an article that comprises a wafer and a transparent element, wherein a first fluid substantially fills a space between an upper surface of the wafer and the transparent element; and (ii) inspecting the wafer by utilizing a lens that contacts a second fluid element that also contacts the transparent element.

Method and system for immersion based inspection

A system and method for inspecting an object. The system includes: a traveling lens acousto-optic device adapted to generate a traveling lens that propagates through an active region of the traveling lens acousto-optic device; a first scanner, adapted to direct a beam of light towards the traveling lens while the traveling lens propagates; a first beam splitter, adapted to receive a beam formed by the traveling lens; and to split the scanned beam to multiple illuminating light beams; multiple detectors; and an objective lens; adapted to receive the multiple illuminating light beams, direct the multiple illuminating light beams towards multiple areas of the object, receive multiple collected light beams from the multiple areas of the object, and direct the multiple collected light beams towards the multiple detectors; wherein each detector is associated with an area of the multiple areas.

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Kadima, Israel

Alexander Veis