Meta Platforms Technologies, LLC

Osram Opto Semiconductors Gmbh

Alexander Tonkikh

Bruno Jentzsch

Markus Broell

Michael Grundmann

Berthold Hahn

Guillaume Lheureux

Salim Boutami

Sophia Antonia Fox

Alexander Franke

A micro-light emitting diode (micro-LED) wafer includes a substrate, an n-type semiconductor layer grown on the substrate, an active region grown on the n-type semiconductor layer and configured to emit visible light, and a p-type semiconductor layer grown on the active region. The active region includes a compressive-strained quantum well layer and compressive-strained quantum barrier layers. At least one of the p-type semiconductor layer or the n-type semiconductor layer includes a tensile-strained layer having a thickness greater than about 50 nm, such that the tensile-strained layers can counter the compressive strain of the active region, thereby reducing the overall strain and bow of the micro-LED wafer.

Strain management of III-P micro-LED epitaxy towards higher efficiency and low bow

A micro-light emitting diode includes a semiconductor mesa structure that includes at least a portion of an n-type semiconductor layer, an active region configured to emit visible light, and a p-type semiconductor layer. The micro-LED device also includes an insulator layer that includes an undoped semiconductor passivation layer grown on sidewalls of the semiconductor mesa structure, and a dielectric passivation layer characterized by a refractive index lower than a refractive index of the undoped semiconductor passivation layer. The micro-LED device further includes a reflective metal layer deposited on the dielectric passivation layer, and a micro-lens configured to collimate the visible light emitted by the active region, where a ratio between a width of the micro-lens and a width of the active region may be greater than about 1.5.

Directional light extraction from micro-LED via localization of light emitting area using mesa sidewall epitaxy

The invention relates to a radiation-emitting semiconductor chip comprising a semiconductor layer sequence having at least two active regions which generate electromagnetic radiation during operation and at least one reflective outer surface which is arranged to the side of each active region wherein the reflective outer surface includes an angle of at least 35° and at most 55° with a main extension plane of the semiconductor chip. The invention also relates to a method for producing a radiation-emitting semiconductor chip.

Radiation-emitting semiconductor chip with reflective inner surface and anti-reflective coating and method for producing thereof

A lateral micro-light emitting diode includes a first semiconductor layer, an active region on the first semiconductor layer and including one or more quantum well layers configured to emit light, a p-type semiconductor region on a first lateral region (e.g., a central region) of the active region, and an n-type semiconductor region on a second lateral region (e.g., peripheral regions) of the active region, where the n-type semiconductor region and the p-type semiconductor region are on a same side of the active region.

Lateral micro-LED

A micro-light emitting diode includes a mesa structure that includes a first set of one or more semiconductor layers, an active layer configured to emit light, a second set of one or more semiconductor layers on the active layer, and a dielectric layer in sidewall regions of the mesa structure. A center region of the second set of one or more semiconductor layers is thicker than a sidewall region of the second set of one or more semiconductor layers, such that a distance from a surface of the sidewall region of the second set of one or more semiconductor layers to the active layer is less than a distance from a surface of the center region of the second set of one or more semiconductor layers to the active layer, thereby forming a surface potential-induced lateral potential barrier at a sidewall region of the active layer.

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Cork, Ireland

Alexander Tonkikh