Berliner Glas Kgaa Herbert Kubatz Gmbh & Co.

Alexander Stein

Peter Preuss

Gunnar Heinze

Michael Fall

Detection circuit for detecting electrical capacitance of electrode device in electrostatic holding device with clamp carrier, particularly for detecting component held by holding device, includes phase control circuit couplable to electrode device and has reference oscillator device, phase comparator and VCO circuit (VCOC). Phase comparator is arranged to generate a control voltage of VCOC as a function of reference signal from reference oscillator device and of VCO feedback signal from VCOC, at least one phase control circuit is configured for controlling VCOC as a function of capacitance to be detected, and for outputting an output signal characteristic of capacitance based on control voltage of VCOC, phase control circuit is configured for connection to electrode device such that VCOC contains capacitance to be detected as frequency-determining component, and reference oscillator device is configured for generating reference signal with adjustable reference frequency. Electrostatic holding device includes at least one such detection circuit.

Detection circuit, electrostatic holding device and method for detecting a component on an electrostatic holding device

An electrostatic holding device () for holding component () by electrostatic holding forces includes clamp carrier () which has electrode device () and is configured for receiving component (), voltage source device () for provision of a source charge current for charging clamp carrier (), source switching device () which is arranged for a switchable connection of voltage source device () with electrode device (), and at least one charge storage device (A,B) which has storage capacitor (A,B) and is configured to receive a clamp discharge current and temporarily store electrical charges of clamp carrier () in storage capacitor (A,B) and provide a storage charge current for charging clamp carrier (). Also described is a method for operating holding device () and transfer circuit () for transmitting charges from working capacitor () to storage capacitor ().

Electrostatic holding device and method for the operation thereof, and charge transfer circuit

Production of a holding apparatus () for electrostatically holding a component, e.g., silicon wafer (), includes connecting plate-type first holding element () and plate-type core element (), first holding element () having first electrode device () and spanning support surface for receiving component (), and the connecting includes the steps: providing liquid adhesive to at least one of the mutually facing surfaces of first holding element () and core element (), aligning first holding element () with first forming tool () such that support surface is matched to predetermined master surface () of first forming tool (), and curing the adhesive, wherein first adhesive connecting layer () is formed, which has thickness variations constituted by form deviations between support surface and at least one of the mutually facing surfaces. Also described is a holding apparatus () configured to electrostatically hold a component, e.g., silicon wafer ().

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Berlin, Germany

Alexander Stein