Carl Zeiss Nts Gmbh

Carl Zeiss Microscopy Gmbh

Alexander Rosenthal

Emmerich Bertagnolli

Wolfram Buhler

Camille Stebler

Heinz Wanzenbock

Ulrike Zeile

Wolfram Buehler

Gottfried Hochleitner

Heinz Wanzenboeck

Wolfram Bühler

Markus Fischer

Heinz Wanzenböck

A processing system for processing an object () is provided, wherein the processing system is adapted, to focus a first energy beam, in particular an electron beam (), and a second energy beam, in particular an ion beam (), on a focusing region () in which a object () to be processed is arrangeable. A processing chamber wall () having two openings () for traversal of both energy beams and a connector () for supplying process gas delimits a processing chamber () from a vacuum chamber () of the processing system. Processing the object by activating the process gas through one of the energy beams and inspecting the object via one of the energy beams is enabled for different orientations of the object relative to a propagation direction of one of the energy beams.

Processing system

A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.

System for processing an object

A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.

System and method for processing an object

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Aalen, Germany

Alexander Rosenthal