Asml Netherlands B.v.

Carl Zeiss Smt Gmbh

Alexander Petrus Josephus Van Lankvelt

Olav Johannes Seijger

Robertus Mathijs Gerardus Rijs

Marco Hendrikus Hermanus Oude Nijhuis

Ingmar August Kerp

Hubertus Renier Maria Van Lierop

Galip Tuna Turkbey

Ahmet Levent Avsar

Alexander Maurice Steenhoek

Erik Roelof Loopstra

Richardus Simon Antonius Oostveen

A vibration isolator () for supporting a payload and isolating the payload from vibrations has: a pressurized gas compartment () formed with a rigid base structure (), which base structure has an opening () covered with a flexible membrane () having an inner surface () facing into the gas compartment and an outer surface () facing in the opposite direction, a support member () for supporting the payload, which support member is arranged in contact with the outer surface () of the membrane, and a clamping member () arranged at the inner surface () of the membrane, wherein the support member and the clamping member form a clamping system (), which system includes at least one magnetic element () effecting the membrane to be pressed against the support member.

Vibration isolator for supporting a payload

The invention provides a vibration isolation device configured to support a structure, comprising: an air mount having a base part mounted on a reference structure and a vibration isolated part, and an inverted pendulum device, wherein a lower end of the inverted pendulum device is mounted on the vibration isolated part of the air mount and an upper end of the inverted pendulum device support the structure to be supported, wherein the vibration isolation device comprises a stiffness adjustment device configured to adjust the stiffness of the inverted pendulum device.

Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device

The invention relates to a vibration isolation system (VIS) comprising: &#x2014;a base (); &#x2014;a coupling element () to be coupled to a vibration sensitive object; &#x2014;a vibration isolator (-) arranged between the base and the coupling element; &#x2014;a bellows () to be arranged between the VIS coupling element or the vibration isolator and a protective housing () surrounding the vibration sensitive object; and &#x2014;one or more separate damping elements to act on convolutions of the bellows.

Vibration isolation system and lithographic apparatus

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Veghel, Netherlands

Alexander Petrus Josephus Van Lankvelt