Asml Netherlands B.v.

Alexander Petrus Hilbers

Ronald Van Der Wilk

The present invention provides a method for containing unwanted electric charge that accumulates on the surface of the dielectric of an electrostatic clamp. One source of such charge is found to be from the triple points where conductive interconnect linesand conductive burl coatingscontact the surface of the dielectric. These triple points are potted by means of an insulating materialsuch that any emitted electrons are contained. While the interconnect linesare completely covered, in the case of the conductive burl coatingalthough the burlcannot be completely covered by the insulating material, the triple point is moved to a region where there is no or at least only low electric field whereby there is no or only little emission of electrons.

Electrostatic clamp, lithographic apparatus and method

An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.

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Velsen-Noord, Netherlands

Alexander Petrus Hilbers