Nano-Electronic and Photonic Devices and Circuits, LLC

Copytele, Inc.

Other

Bell Communications Research, Inc.

Alexander Kastalsky

Sergey L Shokhor

Denis A Krusos

Frank J DiSanto

Boris Gorfinkel

Maurice Halioua

Nikolai Abanshin

Sylvain Naar

Anthony J Campisi

Feliks Chudnovskiy

Joseph H Abeles

Serge Luryi

Robert F Leheny

Anatoly Grinberg

Nikolayi Pavlovich Abanshin

Segey L Shokhor

Boris Spivak

Michael Gurvitch

An electrostatic display employing MEMS (Micro-Electro-Mechanical System) technology is disclosed. The transition from white to black pixel color occurs as two cantilevers covering the pixel area are electrostatically turned from their position parallel to the substrate plane to the position normal to the substrate plane. Four electrode pixel control circuits are used to form row and column matrix. This matrix employs a bi-stability effect resulting from the difference in voltages needed to move the cantilever into an upright position and hold the cantilever in this position.

MEMS electrostatic display

Two methods of producing nano-pads of catalytic metal for growth of single walled carbon nanotubes (SWCNT) are disclosed. Both methods utilize a shadow mask technique, wherein the nano-pads are deposited from the catalytic metal source positioned under the angle toward the vertical walls of the opening, so that these walls serve as a shadow mask. In the first case, the vertical walls of the photo-resist around the opening are used as a shadow mask, while in the second case the opening is made in a thin layer of the dielectric layer serving as a shadow mask. Both methods produce the nano-pad areas sufficiently small for the growth of the SWCNT from the catalytic metal balls created after high temperature melting of the nano-pads.

Method of forming nano-pads of catalytic metal for growth of single walled carbon nanotubes

A new method of electrophoretic nanotube deposition is proposed wherein individual nanotubes are placed on metal electrodes which have their length significantly exceeding their width, while the nanotube length is chosen to be close to that of the metal electrode. Due to electrostatic attraction of individual nanotube to the elongated electrode, every nanotube approaching the electrode is deposited along the electrode, since such an orientation is energetically favorable. This method offers opportunity to produce oriented arrays of individual nanotubes, which opens up a new technique for fabrication and mass production of nanotube-based devices and circuits. Several such devices are considered. These are MESFET- and MOSFET-like transistors and CMOS-like voltage inverter.

Spatial orientation of the carbon nanotubes in electrophoretic deposition process

The carbon nanotube-based electronic and photonic devices are disclosed. The devices are united by the same technology as well as similar elements for their fabrication. The devices consist of the vertically grown semiconductor nanotube having two Schottky barriers at the nanotube ends and one Schottky barrier at the middle of the nanotube. Depending on the Schottky barrier heights and bias arrangements, the disclosed devices can operate either as transistors, CNT MESFET and CNT Hot Electron Transistor, or as a CNT Photon Emitter.

CNT-based electronic and photonic devices

Carbon nanotube (CNT)-based devices and technology for their fabrication are disclosed. The planar, multiple layer deposition technique and simple methods of change of the nanotube conductivity type during the device processing are utilized to provide a simple and cost effective technology for large scale circuit integration. Such devices as p-n diode, CMOS-like circuit, bipolar transistor, light emitting diode and laser are disclosed, all of them are expected to have superior performance then their semiconductor-based counterparts due to excellent CNT electrical and optical properties. When fabricated on semiconductor wafers, the CNT-based devices can be combined with the conventional semiconductor circuit elements, thus producing hybrid devices and circuits.

Nanotube array bipolar transistors

Nanotube array injection lasers

Nanotube array light emitting diodes

Methods of forming catalytic nanopads

Carbon nanotube (CNT)-based devices and technology for their fabrication are disclosed. The discussed electronic and photonic devices and circuits rely on the nanotube arrays grown on a variety of substrates, such as glass or Si wafer. The planar, multiple layer deposition technique and simple methods of change of the nanotube conductivity type during the device processing are utilized to provide a simple and cost effective technology for a large scale circuit integration. Such devices as p-n diode, CMOS-like circuit, bipolar transistor, light emitting diode and laser are disclosed, all of them are expected to have superior performance then their semiconductor-based counterparts due to excellent CNT electrical and optical properties. When fabricated on Si-wafers, the CNT-based devices can be combined with the Si circuit elements, thus producing hybrid Si-CNT devices and circuits.

Nanotube array electronic and opto-electronic devices

The Nanotube Array Ballistic Transistors are disclosed, wherein the ballistic (without collisions) electron propagation along the nanotubes, grown normally to the substrate plane on the common metal electrode, is used for a new class of hybrid (solid state/vacuum) electronic devices. In the disclosed transistors, the array of nanotubes emits electrons into vacuum when electrons gain sufficient energy inside the nanotubes due to ballistic electron movement under the voltage applied to the nanotube ends. In the disclosed devices, planar layer deposition technology is used to form multilayer structures and attach two electrodes to the nanotubes ends. The ballistic transistor can also be used for making a new type of electron-emission display when a phosphor layer is deposited on the anode electrode. The non-ballistic nanotube array transistor, employing field-induced electron emission and the same planar layer deposition technique, is also disclosed, the device being considered to be a transistor approaching terahertz frequency range of operation.

Nanotube array electronic devices

A new class of light emitting and laser diodes is disclosed wherein ballistic (without collisions) electron propagation along the nanotubes, grown normally to the substrate plane on the common metal electrode, provides conditions for the light emission from the nanotubes. The electrons, tunneling from the input contact into high energy states in the nanotubes, emit light via electron energy relaxation between the quantum energy levels existing in the nanotubes due to quantum size effect. In the disclosed devices, planar layer deposition technology is used to form a diode structure with two electrodes attached to the nanotubes ends.

Nanotube array ballistic light emitting devices

A flat panel display is proposed wherein each pixel contains two membranes, covering the entire pixel area, which under the force of electrostatic attraction rotate from their original position parallel to the substrate plane into a final position normal to the substrate plane, thereby altering the optical state of the pixel. The electrostatic force is applied only to narrow conductive strips placed on the membrane sides and rotates the membranes around torsion hinges attached to the membranes through flexible and conductive belts. Two membranes per pixel, turned toward each other in their upright position, increase the viewing angle of the display. Further increase of the viewing angle is based on making both the bottom membrane surface and the pixel interior black. Another disclosed feature in the pixel design is placement of an additional pillar located in the area of the membrane hinges to both facilitate the membrane rotation under the electrostatic force and hold the membrane in the upright position.

Electronic book display based on bi-stable electrostatic shutters

A field emission display comprises an anode comprising a matrix of pixels and a cathode comprising an insulating layer defining a plurality of wells having a conductor therein. A first conductive layer forms a plurality of conductive pads, each of the conductive pads corresponding to one of the wells. A plurality of nanostructures are electrically coupled to the conductive pads. A second conductive layer is formed over the insulating layer and provides a plurality of gate electrodes. When a potential between the conductive pads and gate electrodes exceeds a threshold voltage, the nanostructures emit electrons that impinge on the pixels.

Hybrid active matrix thin-film transistor display

A cold-cathode flat panel display using thin-film-transistor (TFT) anode circuit is disclosed. Associated with each pixel element is a TFT circuit comprising first and second transistors electrically cascaded and a capacitor in communication with an output of the first device and an input of the second transistor used to selectively address pixel elements in the display and hold pixels in their selected states for the frame time. Cold cathode sources are used to emit electrons that are drawn to selected pixel elements that include phosphor areas, which emit light of a known wavelength when struck by the emitted electrons.

A high-energy radiation detector is disclosed which uses a semiconductor material to absorb high-energy radiation and emit secondary light in response. The semiconductor is designed to be largely transparent for the interband light it emits so that the generated secondary photons can reach the semiconductor surface, to be detected by a suitable photo-detector. The semiconductor thus plays a role of a scintillator with the emitted light registered by a photo-detector. Two different device embodiments are disclosed. The first embodiment employs a uniform bulk slab of the appropriately chosen semiconductor, such as n-doped InP. Its principal advantage lies in the simplicity and low cost. The second device employs a multi-layer heterostructure. The principal advantage of the second type detector is the possibility of a substantial enhancement in the efficiency of absorption of the primary high-energy radiation. With appropriate modifications the disclosed detector can be used both for radiation monitoring, like a Gaiger counter, and for high-resolution analysis and characterization of the ionizing radiation.

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Wayside, NJ, United States of America

Alexander Kastalsky