Robert Boschgmbh

Alexander Ilin

Heiko Ridderbusch

Julia Vinogradska

Anna Eivazi

Andreas Michalowski

Alexander Kroschel

Jochen Reinmuth

Philip Kappe

Frank Reichenbach

Reiner Ramsayer

Mawuli Ametowobla

Julia Amthor

Andreas Letsch

Martin Schoepf

Petru Tighineanu

Attila Reiss

Thomas Kiedrowski

Paul Sebastian Baireuther

Lukas Loeber

Till Schade

Patrick Ganter

Stephanie Karg

Dmitriy Mikhaylov

Adina Kerstin Dais

Hannes Willeck

Aitor Echaniz

Marcus Hlavac

Michael Schaenzel

Martin Lustfeld

Ulrich Dittmaier

A computer-implemented method for operating a laser material processing machine. Process parameters are varied with the aid of Bayesian optimization until a result of the manufacturing, in particular the laser material processing, is sufficiently good. The Bayesian optimization is carried out with the aid of a data-based process model in a first phase, the data-based process model being trained as a function of estimated results. In a second phase, the data-based process model is trained as a function of the ascertained result resulting upon activation of the laser material processing machine.

Method and device for operating a laser material processing machine

A method for setting operating parameters of a system, in particular, a manufacturing machine, with the aid of Bayesian optimization of a data-based model, which (in the Bayesian optimization) is trained to output a model output variable, which characterizes an operating mode of the system, as a function of the operating parameters. The training of the data-based model takes place as a function of at least one experimentally ascertained measured variable of the system and the training also taking place as a function of at least one simulatively ascertained simulation variable. The measured variable and the simulation variable each characterize the operating mode of the system. The measured variable and/or the simulation variable is transformed during training with the aid of an affine transformation.

Method and device for setting operating parameters of a laser material processing machine

A computer-implemented method for operating a laser material processing machine. Process parameters are varied with the aid of Bayesian optimization until a result of the laser material processing is sufficiently good. The Bayesian optimization taking place with the aid of a data-based process model, and it being taken into consideration during the variation of the process parameters how probable it is that a variable which characterizes a quality of the result is within predefinable boundaries.

A computer-implemented method for operating a laser material processing machine. An estimated result is ascertained as a function of predefined process parameters, which characterize how good an actual result of the laser material processing will be, and the process parameters are varied by means of Bayesian optimization with the aid of a data-based model, until an actual result of the laser material processing is sufficient enough.

A method is described for manufacturing a micromechanical component including a substrate and a cap connected to the substrate, the cap, together with the substrate, enclosing a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. An access opening connecting the first cavity to surroundings of the micromechanical component is formed in the substrate or in the cap. The first pressure and/or the first chemical composition is adjusted in the first cavity. The access opening is sealed by introducing energy or heat into an absorbing part of the substrate or of the cap with the aid of a laser. The introduction of the energy or heat is controlled with the aid of a laser beam, which includes a spatial laser pulse expansion.

Laser reseal including optimized intensity distribution

A method is provided for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity. An access opening, connecting the first cavity to surroundings of the micromechanical component, is formed in the substrate or in the cap. The first pressure and/or the first chemical composition are adjusted in the first cavity. The access opening is sealed by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser. A recess is formed in a surface of the substrate or of the cap facing away from the first cavity in the area of the access opening for reducing local stresses occurring at a sealed access opening.

Structures for reducing and preventing stress and tensions during processing of silicon with the aid of melting by a laser

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Ludwigsburg, Germany

Alexander Ilin