Carl Zeiss Smt Gmbh

Carl Zeiss Sms Ltd.

Carl Zeizz Smt Gmbh

Alexander Huebel

Matthias Manger

Michael Arnz

Gerd Klose

Uwe Schellhorn

Carola Blaesing-Bangert

Thomas Niederhausen

A testing device () for an EUV optical system () includes a generating device () configured to generate wavelength variable test spectra for the EUV optical system () and a sensor unit configured to detect the test spectra generated by the EUV optical system ().

Testing device for an EUV optical system

A method is provided for calibrating a position-measuring system which includes the following steps: a) multiple measurements of positions of a structure of a sample held by a sample stage at different pressures of the gaseous medium in which the sample stage is arranged, b) ascertaining the pressure dependence when determining actual positions by use of an evaluation unit, c) establishing a calibration rule based on the ascertained pressure dependence, and d) applying the calibration rule when determining the actual positions.

Method for calibrating a position-measuring system and position-measuring system

A method for calibrating a specimen stage of a metrology system is provided, in which a specimen that has multiple marks is positioned successively in different calibration positions, each mark is positioned in the photography range of an optical system by means of the specimen stage in each calibration position of the specimen, and the mark position is measured using the optical system. A model is set up that describes positioning errors of the specimen stage using a system of functions having calibration parameters to be determined. The model takes into consideration at least one systematic measurement error that occurs during the measurement of the mark positions. The values of the calibration parameters are determined based on the model with consideration of the measured mark positions.

Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage

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Aalen, Germany

Alexander Huebel