Carl-zeiss-smt Ag

Carl Zeiss Smt Gmbh

Varta Microbattery Gmbh

Alexander Hirnet

Christoph Zaczek

Alexandra Pazidis

Guenter Scheible, Legal Representative

Harald Schink

Toralf Gruner

Karl-Heinz Schuster

Ulrich Loering

Markus Brotsack

Herbert Fink

Karl-Stefan Weissenrieder

Dieter Schmerek

Michael Lill

Dieter Kloos

Martin Elmer

Sigrid Scheible, Legal Representative

A modular battery storage system includes energy storage modules. A switch is assigned to individual energy storage modules, by which the respective energy storage module can be activated and deactivated. The energy storage modules can connect to one another by the switches such that the individual voltages of activated energy storage modules can be added up to form a total voltage. A method of operating the battery storage system ascertains at least one power value for each of the energy storage modules, the power value being characteristic of the power capacity of the energy storage module. A total voltage is generated by at least two energy storage modules being activated with a time overlap but over activation periods of different length. One of the activation periods of different length is assigned to each of the at least two energy storage modules depending on the ascertained at least one power value.

Method of producing a modular battery storage system, modular battery storage system, and battery management system therefor

A method of processing an optical element which has a substrate () and a layer system () applied to the substrate (), wherein the layer system () in a starting condition has a plurality of volume defects (), wherein the method includes at least partially filling at least one of the volume defects () with a filling material (). Also disclosed is an associated method of manufacturing an optical element.

Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus

An optical component has a substrate, on which at least one curved substrate surface is formed that defines an optical axis of the optical component, wherein the substrate surface is coated with a multilayer coating that is active in the ultraviolet region at a design wavelength &#x3bb;and includes a first layer, applied to the substrate surface, made from a first dielectric material and at least one second layer, applied to the first layer, made from a second dielectric material. The substrate consists essentially of a crystal material that has an axially parallel crystal direction, running parallel to the optical axis, and edge crystal directions perpendicular to edge regions of the curved substrate surface. An angle between the axially parallel crystal direction and the edge crystal directions is at least 17&#xb0;, and the first layer has an essentially untextured layer structure. An anisotropy, caused by the substrate structure, in the optical properties of the multilayer coating can thereby be avoided.

Monocrystalline optical component with curved surface and multilayer coating

In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium.

Projection objective for immersion lithography

Growing community of inventors

Oberkochen, Germany

Alexander Hirnet