Eaton Corporation

Axcelis Technologies, Inc.

Alexander F Pless

Victor M Benveniste

Robert J Mitchell

Allan D Weed

Ernest E Allen

Ernest Everett Allen

Perry J I Justesen

Gary J Rosen

Perry J Justesen

An improved bellows assembly (,) is provided for use in, for example, an ion implanter (,). The bellows assembly comprises a first mounting portion (,) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (,); a second mounting portion (,) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (,); and a steel bellows (,) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (,) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises a first sliding plate (,) having a first wear plate (,), a second sliding plate (,) having a second wear plate (,), and an elastomeric seal (,) for maintaining a vacuum condition at the slidable mating surface provided between the first and second wear plates.

Elastomeric sliding seal for vacuum bellows

An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (52) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (54) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises at least one sliding seal subassembly (80) for maintaining the vacuum, and a support ring (78) and a slide plate (82) located on opposite ends of the sliding seal subassembly. The slide plate and the sliding seal subassembly provide a slidable vacuum-tight mating surface therebetween.

Lateral stress relief mechanism for vacuum bellows

Growing community of inventors

Rockport, MA, United States of America

Alexander F Pless