Bell Telephone Laboratories

At&t Bell Laboratories

Alexander D Butherus

Lucian Arthur D'Asaro

Milton Everett Terry

The use of an anisotropic etchant containing BCl.sub.3 and a source of atomic chlorine for III-V semiconductor materials has yielded improved results for semiconductor devices. For example, via gallium arsenide field effect transistors produced using this anisotropic etchant to fabricate via holes exhibit excellent electrical characteristics.

Method for plasma etching III-V semiconductors with a BCl.sub.3

Method for etching III-V semiconductors and devices made by this method

Carbonyl iron powder core (dust core) materials whose rate of change of magnetic permeability with temperature are preselected, are produced by a process which includes the mixing together of powders from two source batches. These source batches produce core materials whose temperature coefficients, Y and Z, lie on either side of the desired temperature coefficient, X. The fraction, A, of the Y powder is selected in accordance with the formula:

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Lebanon, NJ, United States of America

Alexander D Butherus