University of Michigan

Total Se

Totalenergies Onetech

Alexander Benken

Yogesh B Gianchandani

Tao Li

John-Richard Ordonez-Varela

Partha Dutta

John-Richard Ordonez-varela

Aurelie Le-beulze

Jean-Gregoire Boero-rollo

Neeharika Vellaluru

A capacitive sensor device is fabricated on a dielectric substrate. The capacitive sensor device may include multiple diaphragms that differ in shape and/or size. Each of the diaphragms is paired to upper and lower electrodes in included upper and lower electrode layers, respectively. The lower layer is on the dielectric substrate and couples the lower electrodes to a lower electrode terminal in parallel. The upper electrode layer is separated from the lower electrode layer by a gap defined by a removed sacrificial layer and couples the upper electrodes in parallel to an upper electrode terminal.

Capacitive pressure sensor device including lower and upper electrodes

Investigating the permeability and porosity of geological samples is a routine element of geological studies, and is of particular interest in the oil and gas industry. Core-flood experiments are commonly performed on rock samples to measure transport characteristics in the laboratory. This disclosure reports the design and implementation of a high resolution distributed pressure measurement system for core-flood experiments. A series of microfabricated pressure sensors can be embedded in bolts that are housed within the pressurized polymer sheath that encases a rock core. A feedthrough technology has been developed to provide lead transfer between the sensors and system electronics across a 230-bar pressure difference. The system has been successfully benchtop tested with fluids such as synthetic oil and/or gas. Pressure measurements were recorded over a dynamic range of 20 bar with a resolution as small as 0.3 mbar.

Distributed pressure measurement system for core flood experiments

Growing community of inventors

Ann Arbor, MI, United States of America

Alexander Benken