Solyndra, LLC

Applied Materials, Inc.

Alex Shenderovich

Erel Milshtein

Wen Teh Chang

Boris Djurovic

Daniel Liu

Benyamin Buller

Ilya Lavitsky

Michael Rosenstein

Marc O Schweitzer

Michael Feltsman

Alvin Lau

Benyamin Butler

A scribing system comprising a mounting mechanism, stylus, and force generating mechanism is provided. The mounting mechanism is configured to rotate an elongated object in such a manner that the object is subjected to a bow effect wherein a middle portion of the object bends relative to the end portions of the object. The stylus is for scribing the object at a position x along the long dimension of the object while the mounting mechanism rotates the object. The force generating mechanism is connected to the stylus so that the stylus applies the same constant force to the elongated object regardless of the position x along the long dimension of the object that the stylus is positioned, while the mounting mechanism rotates the object and thereby subjects the object to the bow effect, thereby scribing the object.

Constant force mechanical scribers and methods for using same in semiconductor processing applications

A semiconductor processing chamber having a motorized lid is provided. In one embodiment, the semiconductor processing chamber generally includes a chamber body having sidewalls and a bottom defining an interior volume. A lid assembly is coupled to the chamber body and is movable between a first position that encloses the interior volume and a second position. A hinge assembly thereto is coupled between the lid assembly and the chamber body. A motor is coupled to the hinge assembly to facilitate moving the lid assembly between the first position and the second position.

Motorized chamber lid

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San Francisco, CA, United States of America

Alex Shenderovich