Irresistible Materials, Ltd

Other

Alex Phillip Graham Robinson

Andreas Frommhold

Dongxu Yang

John L Roth

Edward A Jackson

Thomas A Lada

Xiang Xue

Alexandra McClelland

Alan G Brown

Richard Edward Palmer

Tom Lada

Andeas Frommhold

Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative and a crosslinking agent. Further disclosed is a process for forming a hard-mask.

Spin on hard mask material

The present disclosure relates to novel multiple trigger negative working photoresist compositions and processes. The processes involve removing acid-labile protecting groups from crosslinking functionalities in a first step and crosslinking the crosslinking functionality with an acid sensitive crosslinker in a second step. The incorporation of a multiple trigger pathway in the resist catalytic chain increases the chemical gradient in areas receiving a low dose of irradiation, effectively acting as a built in dose depend quencher-analog and thus enhancing chemical gradient and thus resolution, resolution blur and exposure latitude. The photoresist compositions and the methods are ideal for fine pattern processing using, for example, ultraviolet radiation, beyond extreme ultraviolet radiation, extreme ultraviolet radiation, X-rays and charged particle rays.

Multiple trigger photoresist compositions and methods

The present disclosure relates to novel fullerene derivatives, positive and negative photoresist compositions prepared therefrom and methods of using them. The derivatives, their photoresist compositions and the methods are ideal for high speed, fine pattern processing using, for example, ultraviolet radiation, extreme ultraviolet radiation, beyond extreme ultraviolet radiation, X-rays, electron beam and other charged particle rays.

Fullerenes

The present application for patent discloses a composition of matter comprising: comprising a solvent; and an ester having a chemical structure chosen from (I), (II), or (III); wherein X and Y are the same or different, wherein at least one of X and Y comprises an acid labile group, wherein Ris a saturated or unsaturated group having from 1-4 carbon atoms, Ris chosen from hydrogen or a saturated or unsaturated group having from 1-4 carbon atoms, Ris a saturated or unsaturated group having from 1-4 carbon atoms, and Ris a saturated or unsaturated group having from 1-4 carbon atoms and Ais an anion.

Composition of matter and molecular resist made therefrom

Disclosed and claimed herein is a composition of matter having a general structure chosen from (I), (II), (III) or (IV); wherein X and Y are the same or different, wherein at least one of X and Y comprises an acid labile group, wherein Ris a saturated or unsaturated group having from 1-4 carbon atoms, Ris chosen from hydrogen or a saturated or unsaturated group having from 1-4 carbon atoms, Ris a saturated or unsaturated group having from 1-4 carbon atoms, and Ris a saturated or unsaturated group having from 1-4 carbon atoms.

Growing community of inventors

Birmingham, United Kingdom

Alex Phillip Graham Robinson