Cymer, Inc.

Alex Ershov

Thomas Patrick Duffey

Robert A Bergstedt

Rajasekhar Rao

Hong Ye

Daniel Brown

John Viatella

James J Ferrell

Slava Rokitski

Ray Cybulski

Rong (Lauren) Liu

An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.

Very high power laser chamber optical improvements

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Escondido, CA, United States of America

Alex Ershov