Kla Tencor Corporation

Alex Chuang

David Lee Brown

Lance Glasser

Kurt Lehman

Venkatraman Iyer

Henrik Nielsen

Guowu Zheng

Kenneth F Hatch

Mansour Kermat

A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.

Integrated multi-channel analog front end and digitizer for high speed imaging applications

Growing community of inventors

Cupertino, CA, United States of America

Alex Chuang