Spansion Llc.

Advanced Micro Devices Corporation

Alex Bierwag

Charles Ray Mathews

Stuart Litwin

Michael G McIntyre

Charlie Reading

Alfredo V Herrera

A method of deprocessing a semiconductor structure is provided. The method involves removing a silicide layer over a second poly layer, an interpoly dielectric layer, a first poly layer, an optionally an oxide layer on a substrate. The method may further involve at least one of removing a second poly layer, removing an interpoly dielectric layer, removing a first poly layer, removing an oxide layer, and removing an unimplanted portion of a substrate. The exposed layer/portion of the semiconductor structure can be subjected to an inspection for defects and/or other characteristics. The inspection can aid in defect reduction strategies, among other things, when applied to new technology ramp, monitoring of baseline wafer starts, customer returns, etc.

Floating gate process methodology

A method of deprocessing a semiconductor structure is provided. The method involves removing one or more interlevel dielectric layers and one or more metal components from a frontside of the semiconductor structure. By removing the interlevel dielectric layer and the metal component, the exposed portion of the semiconductor structure can be subjected to an inspection for defects and/or other characteristics by using an inspection tool. The inspection can aid in defect reduction strategies, among other things, when applied to new technology ramp, monitoring of baseline wafer starts, customer returns, etc.

Copper process methodology

A method, apparatus, and a system for generating an index for storing data. A pattern associated with a first set of data is determined. The first set of data is stored. A determination is made as to whether the pattern associated with a second set of data corresponds to the pattern associated with the first set of data. An index associated with the first set of data is correlated to the second set of data in response to determining that the pattern associated with the second set of data corresponds to the pattern associated with the first set of data.

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Austin, TX, United States of America

Alex Bierwag