Maxim Integrated Products, Inc.

Hanking Electronics, Ltd.

Stmicroelectronics S.r.l.

Maxim Integrated Gmbh

Alessandro Rocchi

Lorenzo Bertini

Eleonora Marchetti

Marco Pasotti

Pier Luigi Rolandi

Marco Bisio

Guido De Sandre

Giovanni Guaitini

A micromechanical sensor that can detect shock effects in order to prevent false measurements. The sensor includes a substrate having a measurement axis and a detection axis that are disposed orthogonally to each other, and first and second driving masses disposed in a plane containing the measurement and detection axes. Each of the driving masses is rotatably coupled to the substrate via a central suspension disposed on the detection axis. The sensor includes drive electrodes that generate rotary motions in each of the driving masses about a drive axis thereof. At least one elastic connecting element allows the driving masses to deflect in opposite directions in response to a rate of rotation about the measurement axis but deflect in the same direction in response to a shock condition.

Micromechanical coriolis rate of rotation sensor

Various embodiments of the invention allow for increased shock robustness in gyroscopes. In certain embodiments, immunity against undesired forces that corrupt signal output is provided by a chessboard-pattern architecture of proof masses that provides a second layer of differential signals not present in existing designs. Masses are aligned parallel to each other in a two-by-two configuration with two orthogonal symmetry axes. The masses are driven to oscillate in such a way that each mass moves anti-parallel to an adjacent proof mass. In some embodiments of the invention, a mechanical joint system interconnects proof masses to suppress displacements due to mechanical disturbances, while permitting displacements due to Coriolis forces to prevented erroneous sensor signals.

Systems and methods for MEMS gyroscope shock robustness

The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses () that are movable radially with respect to a center and drive elements () for the oscillating vibration of the drive masses () in order to generate Coriolis forces on the drive masses () in the event of rotation of the substrate about the x-, y-, and/or z-axis. The oscillating drive masses () are connected to at least one further non-oscillating sensor mass () that however can be rotated about the x-, y-, and/or z-axis together with the oscillating drive masses () on the substrate. Sensor elements () are used to detect deflections of the sensor mass () and/or drive masses () in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors () are used to rotatably fasten the sensor mass () to the substrate by means of springs ().

MEMS gyroscope for determining rotational movements about an x, y, and/or z axis

Various embodiments of the invention integrate multiple shock-robust single-axis MEMS gyroscopes into a single silicon substrate while avoiding the complexities typically associated with designing a multi-drive control system for shock immune gyroscopes. In certain embodiments of the invention, a shock immune tri-axial MEMS gyroscope is based on a driving scheme that employs rotary joints to distribute driving forces generated by two sets of driving masses to individual sensors, thereby, simplifying the control of the gyroscope.

Shock-robust integrated multi-axis MEMS gyroscope

Micro-electro-mechanical-systems (MEMS) sensors and methods for detecting rates of rotation thereof. The MEMS sensor has at least one driving mass that oscillates along the x-axis, and at least one sensing mass coupled to the driving mass so that the sensing and driving masses move relative to each other in the x direction and are coupled for rotation together about the y and/or z axes. At least one anchor spring couples the driving or sensing mass to an anchor secured to a substrate. Rotation of the MEMS sensor is sensed by sensing relative movement between the substrate and sensing mass. During its oscillation, the driving mass generates an imbalance of the driving and sensing masses with respect to the anchor, and Coriolis forces cause the sensing and driving masses to rotate together about the y or z axis when the MEMS sensor rotates about the y or z axis.

MEMS sensors and methods for detecting rotation rates

A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each disposed orthogonally to each other and a first and a second driving mass () disposed in an X-Y plane parallel to the substrate. Each driving mass () being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the Y-axis. Drive means are used for generating a rotational oscillation of the driving masses () about the drive axis (Z) at each central suspension. At least one elastic connecting element () is disposed on each of the driving masses () on both sides of the Y-axis and spaced apart from the same for connecting and oscillating the two driving masses () in a mutually tuned manner.

The invention concerns a MEMS sensor and a method for detecting accelerations along, and rotation rates about, at least one, preferably two of three mutually perpendicular spatial axes x, y and z by means of a MEMS sensor (), wherein at least one driving mass () and at least one sensor mass () are moveably arranged on a substrate () and the at least one driving mass () is moved relative to the at least one sensor mass () in oscillation at a driving frequency and when an external acceleration of the sensor occurs, driving mass/es () and sensor mass/es () are deflected at an acceleration frequency and, when an external rotation rate of the sensor () occurs, are deflected at a rotation rate frequency, and the acceleration frequency and rotation rate frequency are different. At the MEMS-sensor the driving mass/es () and sensor mass/es () are arranged on the substrate (), and are balanced in the resting state by means of at least one of the anchors (). In the driving mode the driving mass/es (), when vibrating in oscillation about this at least one anchor (), generate/s an imbalance of the driving mass/es () and the sensor mass/es () with respect to this at least one anchor (), and the sensor elements detect deflections of the driving and sensor masses, due to torques and Coholis forces generated, with an acceleration frequency and/or a rotation rate frequency.

Method for detecting accelerations and rotation rates, and MEMS sensor

The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or Z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses () that are movable radially With respect to a center and drive elements () for the oscillating vibration of the drive masses () in order to generate Coriolis forces on the drive masses () in the event of rotation of the substrate about the x-, y-, and/or Z-axis. The oscillating drive masses () are connected to at least one further non oscillating sensor mass () that however can be rotated about the x-, y-, and/or Z-axis together With the oscillating drive masses () on the substrate. Sensor elements () are used to detect detections of the sensor mass () and/or drive masses () in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors () are used to rotatably fasten the sensor mass () to the substrate by means of springs ().

MEMS gyroscope for detecting rotational motions about an X-, Y-, and/or Z-axis

A microgryroscope for determining rotational movements about an x, y or z axis. At least one anchor is fastened to a substrate. A plurality of, in particular four, masses that oscillate radially with respect to the anchor are fastened to the anchor by springs. Drive elements are used to vibrate at least individual ones of the masses in an oscillatory manner in the x or y direction in order to produce Coriolis forces when the substrate is deflected. Sensor elements are used to detect deflections of the masses on account of the Coriolis forces produced. The oscillating masses are connected to at least one additional, non-oscillating mass which can, however, rotate together with the oscillating masses on the substrate about the at least one anchor. A further sensor element is associated with this additional mass.

Microgyroscope

A MEMS sensor is provided with a substrate and a sensor element. The sensor element moves in response to an influence registered by the sensor primarily in an oscillating turn around a sensor axis that is parallel to the substrate. The sensor has an anchor arranged on the substrate in order to hold the sensor element onto the substrate. A connecting element arranges the sensor element on the anchor.

MEMS rotational sensor with improved anchoring

A digital device for testing and calibrating the oscillation frequency of an integrated oscillator circuit, the testing and calibrating device has as input at least first and second control parameters corresponding to limiting values of a predetermined range of values of the oscillation frequency sought for the integrated oscillator circuit, and it includes a comparison circuit for comparing a signal of known duration and a signal from the integrated oscillator circuit; a circuit connected to the comparison circuit, for generating calibration values for the signal from the integrated oscillator circuit; and a circuit for forcing storage of final calibration values of the signal from the integrated oscillator circuit into a storage and control section of the integrated oscillator circuit.

Device for testing and calibrating the oscillation frequency of an integrated oscillator

A FLASH memory is organized in a plurality of physical sectors which may be split into a plurality of singularly addressable logic sectors. Each logic sector may include a memory space of a predetermined size and a chain pointer assuming a neutral value or a value pointing to a second logic sector associated with a respective chain pointer at the neutral value. Each logic sector may also include a status indicator assuming at least one of a first value if the logic sector is empty, a second value if the data therein belongs to the logic sector, a third value if the data does not belong to the logic sector, and a fourth value if the data has been erased. Further, each logic sector may include a remap pointer assuming the neutral value or a value pointing directly or indirectly to the chain pointer of a third logic sector.

Growing community of inventors

Rosignano Solvay, Italy

Alessandro Rocchi