Lam Research Corporation

Ales Janhar

Dirk Rudolph

John Folden Stumpf

Behzad Lajevardi

Eric Tu

Justin Remulla

Various embodiments include methods and apparatuses to provide human safety and machine safety and operations. In one example, a distributed interlock system includes at least one master device coupled to a number of slave device. The slave devices receive signals from one or more tools and provide the signals to the master device. The master device evaluates the signals and prevents unsafe conditions prior to one or more command executions, related to the unsafe conditions, being transmitted to one or more of the slave devices. Other methods and systems are disclosed.

Configurable distributed-interlock-system

A data capture module includes a first port configured to receive first data transmitted from a first component to a second component of a substrate processing system, a second port configured to received second data transmitted from the second component to the first component, a first data stream forwarding module configured to duplicate the first data, forward the duplicated first data to the second port, and output the first data, and a second data stream forwarding module configured to duplicate the second data, forward the duplicated second data to the first port, and output the second data. The first port is configured to transmit the duplicated second data to the first component and the second port is configured to transmit the duplicated first data to the second component. A data compression module is configured to compress the first and second data. Data storage is configured to store the compressed data.

Growing community of inventors

San Ramon, CA, United States of America

Ales Janhar