Applied Materials, Inc.

Aleksey Yanovich

Thorsten Kril

Natalia Kroupnova

Mikhail B Kozine

Dermot Cantwell

A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.

Method and apparatus to automatically create virtual sensors with templates

A server computer system creates a reference fingerprint for a first tool running a recipe. The server computer system uses reference data that pertains to the first tool performing within parameters to create the reference fingerprint. The reference fingerprint includes a target baseline and allowable ranges based on the target baseline. The server computer system determines whether sample data that is associated with a second tool running the recipe is performing within the parameters based on a comparison of the sample data to the reference fingerprint. The second tool can be the first tool or another tool of a same type as the first tool. The server computer system provides a classification of the second tool to at least one of a system or a user based on the comparison of the sample data to the reference fingerprint. The classification indicates whether the second tool is performing within the parameters.

K-nearest neighbor-based method and system to provide multi-variate analysis on tool process data

A method and apparatus for providing a virtual sensor in real-time have been described. In one embodiment, a method to provide a virtual sensor in real-time includes identifying data indicating desired functionality. The method further includes executing the virtual sensor in real-time based on the identified data to generate an output of the virtual sensor with the output being used by at least one data analysis module in real-time for statistical process monitoring.

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Santa Clara, CA, United States of America

Aleksey Yanovich