Rnd-isan. Ltd

Aleksander Petrovich Shevelko

Vladimir Mikhailovich Krivtsun

Oleg Feliksovich Yakushev

Dmitriy Borisovich Abramenko

The invention relates to a compact wideband vacuum ultraviolet (VUV) and soft X-ray grazing incidence spectrometer based on a plane amplitude diffraction grating. The spectrometer enables simultaneous detection of a VUV spectrum in a positive first order of diffraction and a negative first order of diffraction. The technical result of the invention is that of recording a spectrum in a wide spectral range (3-200 nm) with a moderate spectral resolution (&#x3bb;/&#x3b4;&#x3bb;&#x2dc;15-30) and with a significantly higher spectral resolution (&#x3bb;/&#x3b4;&#x3bb;&#x2dc;100-200) in a narrow soft X-ray or extreme ultraviolet range with the possibility of measuring the absolute radiation output in these regions of the spectrum.

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Moscow, Russia

Aleksander Petrovich Shevelko