International Business Machines Corporation

Albrik Avanessian

Dureseti Chidambarrao

Stephen Edward Greco

Douglas Wayne Kemerer

Tina Jane Wagner

Henry A Bonges, Iii

A design rule that determines a degree of overlap between two design elements in two adjoining levels by estimating a physical overlap area, or an 'intersect area,' of corresponding structures in a semiconductor chip is provided. The estimation of the physical intersect area may factor in line edge biasing, critical dimension tolerance, overlay tolerance, and corner rounding to provide an accurate estimate of a physical area for each of the structures corresponding to the two design elements. The intersect area is employed as a metric to determine compliance with a ground rule, i.e., the ground rule is specified in terms of the intersect region. Other derived quantities such as electrical resistance, electromigration resistance, expected yield may be calculated from the intersect area, and may be advantageously employed to optimize the design data.

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Albrik Avanessian